Secondary Ion Mass Spectrometry

Forward x
Preface xi
Acknowledgements xiv
List of physical constants xiv
Chapter 1: Introduction
1.1 Matter and the Mass Spectrometer
1.2 Secondary Ion Mass Spectrometry
1.3 Summary
Section I
Chapter 2: Properties of atoms, ions, molecules and solids
2.1 The Atom
2.2 Electronic structure of atoms and ions
2.3 Summary
Chapter 3: Current understanding of sputtering and ion formation
3.1 The fundamentals of SIMS
3.2 Sputtering
3.3 Ionization/neutralization
3.4 Summary
Section II
Chapter 4: Instrumentation
4.1 The science of measurement
4.2 Hardware
4.3 Summary
Chapter 5: Data collection
5.1 The art of measurement
5.2 Sample preparation and handling
5.3 Data collection
5.4 Data conversion
5.5 Summary
Appendix
i) Periodic table of the elements
ii) Isotope masses, natural isotope abundances, atomic weights and mass densities of the elements
iii) 1st and 2nd Ionization potentials and electron affinities of the elements
iv) Work-functions of elemental solids
v) SIMS detection limits of selected elements
vi) Charged particle beam transport
vii) Statistical properties
viii) SIMS instrument designs
ix) Additional SIMS methods of interest
x) Additional spectrometric/spectroscopic techniques
xi) Additional microscopic techniques
xii) Diffraction / reflection techniques
Technique acronym list
Abbreviations commonly used in SIMS
Glossary of terms
Questions and answers
References
Index
Notes