This book documents the proceedings of the Third Symposium on Particles in Gases and Liquids: Detection, Characterization and Control held as a part of the 22nd Annual Meeting of the Fine Particle Society in San Jose, California, July 29-August 2, 1991. This series of symposia was initiated in 1987 in light of the growing importance to eliminate particles from process gases and liquids. As pointed out in the Preface to antecedent volumes in this series that particles in process gases and liquids could cause significant yield losses in precision manufacturing and concomitantly there has been heightened interest in understanding the behavior of particles in gases and liquids and devising ways to eliminate, or at least reduce substantially, these particles. The concern about particles in gases and liquids has been there for qui.te some time in the microelectronics arena, but there are other areas also where particles are of significant concern, e.g. in operation theatres in hospitals, food and beverage industry, and pharmaceutical manufacturing. This symposium basically had the same objectives as its predecessors, but to provide an update on the R&D activity taking place in the arena of particle detection, characterization and control. The printed program comprised a total of 28 papers dealing with variegated aspects of particles in gases and liquids. There were brisk and lively discussions and the attendees offered many positive comments, which goes to show that it was a well-received and needed symposium.
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ISBN-13
978-1-4899-1187-2 (9781489911872)
DOI
10.1007/978-1-4899-1187-2
Schweitzer Klassifikation
Overview of Digital Simulation Procedures for Aerosols Transport in Turbulent Flows.- Deposition of Submicron Particles on Surfaces, Part I: Electrostatic Effect.- Deposition of Submicron Particles on Surfaces, Part II: Turbulence Effect.- The Influence of Solution Properties on the Deposition of Particles from Liquid Media onto Silicon Wafer Surfaces.- Thermophoretically Enhanced Deposition of Sub-Micrometer Particles from a Hot Turbulent Gas.- Statistics of Continuous Particulate Measurement in Process Gas Streams.- Testing Philosophy and Methodology for UHP Gas Handling Components.- A Two-Stage Virtual Impactor for Continuous Concentration of Particles in an Aerosol.- Evaluation of the API Aerosizer Mach 2 Particle Sizer.- A Triboelectrically Charged Granular Filter with High Filtration Efficiency.- Reduction of Aerosolized Lubricant Contamination in the Airstream of Disk Drives by Proper Ball Bearing Seal Designs.- Design of Cleanroom Airflows for Particle Control Using CFD Analysis: Case Studies.- Cosmetics as a Potential Source of Particulate Contamination in the Clean Room.- Factors Affecting the Number of Airborne Particles Released from Clean Room Operators.- Scientific and Technological Issues Pertaining to Particle Contamination in Plasma Processing.- Enumeration, Characterization, and Monitoring of Particles in Pharmaceutical Manufacturing.- Use of A Modified Particle Recognition and Characterization (PRC) Technique to Monitor Cleaning Fluids in HDA Fabrication.- Ultraclean Marangoni Drying.- About the Contributors.
