Applications of Piezoelectric Quartz Crystal Microbalances

¿PrefaceChapter 1. Introduction, History, and Overview of Applications of Piezoelectric Quartz Crystal Microbalances I. Introduction II. History of Piezoelectric Quartz Crystal Microbalances A. Piezoelectric Effect B. Frequency Control with Quartz Crystals C. Relating Changes in Mass to Frequency Measurements III. Overview of Applications of Piezoelectric Quartz Crystal Microbalances A. Chapter 2, Theory and Practice of the Quartz Crystal Microbalance B. Chapter 3, Applications of Quartz Crystal Microbalances for Thin Film Deposition Process Control C. Chapter 4, Stress Effects in Quartz Crystal Microbalances D. Chapter 5, Simultaneous Measurement of Mass and Temperature Using Quartz Crystal Microbalances E. Chapter 6, Applications of Quartz Crystal Microbalances in Surface Science F. Chapter 7, Quartz Crystal Microbalances for Plasma-Assisted Etching Studies and Applications G. Chapter 8, Applications of Quartz Crystal Microbalances in Analytical Chemistry H. Chapter 9, Application of the Quartz Crystal Microbalance to Space System Contamination Studies I. Chapter 10, Applications of Quartz Crystal Microbalances in Aerosol Mass Measurement ReferencesChapter 2. Theory and Practice of the Quartz Crystal Microbalance I. Introduction II. Piezoelectric Quartz Crystal Resonators A. Modes of Vibration B. Crystallographic Orientation C. Temperature Dependence of the Resonant Frequency D. Equivalent Circuit III. Theory of the Piezoelectric Quartz Crystal Microbalance A. A Linear Frequency-to-Mass Equation for Small Mass Loads B. A Linear Period-to-Mass Approximation for Extended Mass Loads C. A General Formula for Mass Determination by a Quartz Crystal Microbalance IV. The Role of Acoustic Impedance in a Quartz Crystal Microbalance A. Experiments with Different Materials B. Computation and Estimation of Acoustic Impedance C. Accumulated Layers of Different Materials V. Design Considerations for a Quartz Crystal Microbalance A. The Quartz Crystal and its Supporting Structures B. Limit of Mass Load on a Quartz Crystal Microbalance C. Quartz Crystal Microbalances for Special Environments D. Associated Electronics VI. Conclusion ReferencesChapter 3. Applications of Quartz Crystal Microbalances for Thin Film Deposition Process Control I. Introduction II. Quartz Crystal Microbalances A. Fundamentals B. Differential Mass Sensitivity C. Limiting Factors to the Accuracy and Mass Load III. Thin Film Monitoring with Quartz Crystal Microbalances A. Formation of Films with Reproducible Characteristics B. Reliable Measures for Depositing Films with Correct and Reproducible Characteristics C. Conclusions and Measures to Increase the Reproducibility of Film Characteristics IV. Control of an Automatic Deposition System Using a Quartz Crystal Monitor A. General Principles B. Realization of an Automatic Coating System C. Final Remarks Acknowledgments ReferencesChapter 4. Stress Effects in Quartz Crystal Microbalances I. Introduction II. Origin of the Stress Effects III. Magnitude of the Stress Effect for Microbalance Applications IV. Simultaneous Mass and Stress Measurements Using the Double Resonator Technique A. Development of Equations for Sf (dfA, dfB) and Mf (dfA, dfB) B. Sf and Mf for Au Films Bombarded with 45 keV Kr Ions C. Lateral Stress in Si Films Bombarded with 220 keV Kr Ions V. Generalization of the Double Resonator Technique VI. Thermal Shock Effects in Quartz Resonator Microbalances VII. The SC-Cut as a Microbalance ReferencesChapter 5.