Spectroscopic Ellipsometry

Foreword.
Preface.
Acknowledgments.
1 Introduction to Spectroscopic Ellipsometry.
1.1 Features of Spectroscopic Ellipsometry.
1.2 Applications of Spectroscopic Ellipsometry.
1.3 Data Analysis.
1.4 History of Development.
1.5 Future Prospects.
References.
2 Principles of Optics.
2.1 Propagation of Light.
2.2 Dielectrics.
2.3 Reflection and Transmission of Light.
2.4 Optical Interference.
References.
3 Polarization of Light.
3.1 Representation of Polarized Light.
3.2 Optical Elements.
3.3 Jones Matrix.
3.4 Stokes Parameters.
References.
4 Principles of Spectroscopic Ellipsometry.
4.1 Principles of Ellipsometry Measurement.
4.2 Ellipsometry Measurement.
4.3 Instrumentation for Ellipsometry.
4.4 Precision and Error of Measurement.
References.
5 Data Analysis.
5.1 Interpretation of (Psi, Delta).
5.2 Dielectric Function Models.
5.3 Effective Medium Approximation.
5.4 Optical Models.
5.5 Data Analysis Procedure.
References.
6 Ellipsometry of Anisotropic Materials.
6.1 Reflection and Transmission of Light by AnisotropicMaterials.
6.2 Fresnel Equations for Anisotropic Materials.
6.3 4×4 Matrix Method.
6.4 Interpretation of (Psi, Delta) for AnisotropicMaterials.
6.5 Measurement and Data Analysis of Anisotropic Materials.
References.
7 Data Analysis Examples.
7.1 Insulators.
7.2 Semiconductors.
7.3 Metals/Semiconductors.
7.4 Organic Materials/Biomaterials.
7.5 Anisotropic Materials.
References.
8 Real-Time Monitoring by Spectroscopic Ellipsometry.
8.1 Data Analysis in Real-Time Monitoring.
8.2 Observation of Thin-Film Growth by Real-Time Monitoring.
8.3 Process Control by Real-Time Monitoring.
References.
Appendices.
1 Trigonometric Functions.
2 Definitions of Optical Constants.
3 Maxwell's Equations for Conductors.
4 Jones-Mueller Matrix Conversion.
5 Kramers-Kronig Relations.
Index.