Surface and Thin Film Analysis

Preface
INTRODUCTION

PART I: Electron Detection

X-RAY PHOTOELECTRON SPECTROSCOPY (XPS)
Principles
Instrumentation
Spectral Information and Chemical Shifts
Quantification, Depth Profiling, and Imaging
The Auger Parameter
Applications
Ultraviolet Photoelectron Spectroscopy (UPS)
AUGER ELECTRON SPECTROSCOPY (AES)
Principles
Instrumentation
Spectral Information
Quantification and Depth Profiling
Applications
Scanning Auger Microscopy (SAM)
ELECTRON ENERGY-LOSS SPECTROSCOPY (EELS) AND ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPY (EFTEM)
Principles
Instrumentation
Qualitative Spectral Information
Quantification
Imaging of Element Distribution
Summary
LOW-ENERGY ELECTRON DIFFRACTION (LEED)
Principles and History
Qualitative Information
Quantitative Structural Information
Low-Energy Electron Microscopy
OTHER ELECTRON-DETECTING TECHNIQUES
Ion (Excited) Auger Electron Spectroscopy (IAES)
Ion Neutralization Spectroscopy (INS)
Inelastic Electron Tunneling Spectroscopy (IETS)

PART II: Ion Detection

STATIC SECONDARY ION MASS SPECTROMETRY (SSIMS)
Principles
Instrumentation
Quantification
Spectral Information
Applications
DYNAMIC SECONDARY ION MASS SPECTROMETRY (SIMS)
Principles
Instrumentation
Spectral Information
Quantification
Mass Spectra
Depth Profiles
Imaging
Three-Dimensional (3-D)-SIMS
Applications
ELECTRON-IMPACT (EI) SECONDARY NEUTRAL MASS SPECTROMETRY (SNMS)
Introduction
General Principles of SNMS
Instrumentation and Methods
Spectral Information and Quantification
Element Depth Profiling
Applications
LASER SECONDARY NEUTRAL MASS SPECTROMETRY (LASER-SNMS)
Principles
Instrumentation
Spectral Information
Quantification
Applications
RUTHERFORD BACKSCATTERING SPECTROSCOPY (RBS)
Introduction
Principles
Instrumentation
Spectral Information
Quantification
Figures of Merit
Applications
Related Techniques
LOW-ENERGY ION SCATTERING (LEIS)
Principles
Instrumentation
LEIS Information
Quantification
Applications of LEIS
ELASTIC RECOIL DETECTION ANALYSIS (ERDA)
Introduction
Fundamentals
Particle Identification Methods
Equipment
Data Analysis
Sensitivity and Depth Resolution
Applications
NUCLEAR REACTION ANALYSIS (NRA)
Introduction
Principles
Equipment and Depth Resolution
Applications
FIELD ION MICROSCOPY (FIM) AND ATOM PROBE (AP)
Introduction
Principles and Instrumentation
Applications
OTHER ION-DETECTING TECHNIQUES
Desorption Methods
Glow-Discharge Mass Spectroscopy (GD-MS)
Fast-Atom Bombardment Mass Spectroscopy (FABMS)

PART III: Photon Detection

TOTAL-REFLECTION X-RAY DLUORESCENCE (TXRF) ANALYSIS
Principles
Instrumentation
Spectral Information
Quantification
Applications
ENERGY-DISPERSIVE X-RAY SPECTROSCOPY (EDXS)
Principles
Practical Aspects of X-Ray Microanalysis and Instrumentation
Qualitative Spectral Information
Quantification
Imaging and Element Distribution
Summary
GRAZING INCIDENCE X-RAY METHODS FOR NEAR-SURFACE STRUCTURAL STUDIES
Principles
Experimental Techniques and Data Analysis
Applications
GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD-OES)
Principles
Instrumentation
Spectral Information
Quantification
Depth Profiling
Applications
SURFACE ANALYSIS BY LASER ABLATION
Introduction
Instrumentation
Depth Profiling
Near-Field Ablation
Conclusion
ION BEAM SPECTROCHEMICAL ANALYSIS (IBSCA)
Principles
Instrumentation
Spectral and Analytical Information
Quantitative Analysis by IBSCA
Applications
REFLECTION ABSORPTION IR SPECTROSCOPY (RAIRS)
Instrumentation
Principles
Applications
Related Techniques
SURFACE RAMAN SPECTROSCOPY
Principles
Surface-Enhanced Raman Scattering (SERS)
Instrumentation
Spectral Information
Quantification
Applications
Nonlinear Optical Spectroscopy
UV-VIS-IR ELLIPSOMETRY (ELL)
Principles
Instrumentation
Applications
SUM FREQUENCY GENERATION (SFG) SPECTROSCOPY
Introduction to SFG Spectroscopy
SFG Theory
SFG Instrumentation and Operation Modes
Applications of SFG Spectroscopy and Selected Case Studies
Conclusion
OTHER PHOTON-DETECTING TECHNIQUES
Appearance Potential Methods
Inverse Photoemission Spectrosc