Secondary Ion Mass Spectroscopy of Solid Surfaces

Preface -- Chapter 1. Physics olsecondary ion emIssion -- 1.1. Parameters of secondary ion emission -- 1.2. Effect of the primary ion energy and current on SIE -- 1.3. Effect of the target temperature on the SIE coefficient -- 1.4. Angular dependence of secondary ion emission -- 1.5. Secondary ion energy distribution -- 1.6. Effect of primary ions and target material on secondary ion yield -- 1.7. Effect of sample oxidation on STE -- 1.8. Polyatomic ion emission -- 1.9. Mechanism of ionization of ejected atoms References -- Chapter 2. SIMS instrumentation -- 2.1. Ion sources -- 2.2. Mass separation of primary beam -- 2.3. Primary and secondary ion optics -- 2.4. Mass spectrometers -- 2.5. Ion detection and vacuum systems -- 2.6. Mass-spectral microscopes -- 2.7. Ion microprobes References -- Chapter 3. Constitutional analysis of solids by SIMS -- 3.1. Analytical characteristics of SIMS -- 3.2. Qualitative constitutional analysis -- 3.3. Physical background of quantitative analysis -- 3.4. Methods of quantitative analysis -- 3.5. Analysis of organic and biological samples -- 3.6. Standards and cross-calibration of instruments References -- Chapter 4. In-depth analysis -- 4.1. Technique of SIMS in-depth analysis -- 4.2. Study of thin films (vacuum condensates) -- 4.3. In-depth analysis of implantation profiles -- 4.4. Spatially multidimensional SIMS analysis References -- ChapterS. Study of processes at the surface -- 5.1. Adsorption and catalysis -- 5.2. Investigation of metal oxidation -- 5.3. Comparison of SIMS with other methods of surface analysis -- References -- Index.