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Discover a comprehensive look at the principles and applications of microsystem dynamics
Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Since research and industrial production in recent decades has generated considerable knowledge of microsystem dynamics, there is an urgent need for a single guide which combines microsystem theory with practical applications to provide a general framework.
Microsystem Dynamics fills this need, with the first single-volume overview of its kind. It presents the fundamental principles of microsystem dynamics in a unified theoretical framework, engineered to govern both analysis and design. Its discussion of applications includes cutting-edge methods for applying non-stationary, stochastic, non-linear dynamics and multi-physics of microsystems. Fully engaged with the latest research, this promises to be the essential single-volume introduction to its subject.
Microsystem Dynamics readers will find:
Microsystem Dynamics is a useful reference for researchers and practitioners working in microscale engineering, as well as graduate students in mechanical, automotive, and electrical engineering.
Gang S. Chen is a professor at Marshall University. His industry experience includes working at Gates Corp., IBM, Sony, and DSI. He is also a Fellow of ASME and SAE.
Jianfeng Xu is a professor and associate dean of the School of Mechanical Engineering at Huazhong University of Science and Technology. His industry experience includes working at Applied Materials and DSI.
Wei Hua is a principal consultant at ABSWorld. His previous experience includes working at DSI.
Preface vii
1 Introduction 1
1.1 Definition of Microsystem, Vibrations and Dynamics 1
1.2 Engineering and Scientific Significance of Microsystem Dynamics 2
1.3 Organization of the Book 4
2 Vibrations and Dynamics 7
2.1 Introduction 7
2.2 Vibration of Linear System Under Deterministic Excitations 7
2.2.1 Vibration of Linear Discrete and Continuous Systems 7
2.2.2 Vibration of Linear Discrete Systems: Single-degree-of-freedom System 8
2.2.3 Vibrations of Linear Discrete Systems: Multiple-degree-of-freedom System 12
2.2.3.1 Eigenvalues and Eigenvectors 13
2.2.3.2 Forced Vibration Solution of an MDOF System 15
2.2.4 Vibrations of Continuous Systems 16
2.2.4.1 Transverse Vibrations of String and Wave Equation 16
2.2.4.2 Longitudinal Vibration of Rods and Torsional Vibration of Shafts 20
2.2.4.3 Transverse Vibration of Beams 21
2.3 Random Vibrations Under Deterministic Excitations 24
2.3.1 Probability Density, Autocorrelation, and Power Spectral Density Function 25
2.3.2 Response of an SDOF System to an Arbitrary Function Input 27
2.3.3 Power Spectral Density Function 29
2.3.4 Joint Probability Density Function and Cross-correlation Function 30
2.3.5 Response of Linear Dynamic System to a Random Input 32
2.4 Nonlinear Vibrations 35
2.4.1 Perturbation Method, Duffing Equation 35
2.4.2 Amplitude Frequency-dependent and Jump Phenomenon 39
2.4.3 Van der Pol's equation 39
2.4.4 Method of Variation of Parameter 40
2.4.5 Phase Plot, Limit Cycles, Self-excited Oscillations, and Chaos 41
2.4.6 Stability of Equilibrium 43
2.4.7 Parametrically Excited System and Mathieu's Equation 46
2.4.8 Transient and Nonstationary Vibrations 48
2.4.9 Multi-degree-of-freedom Systems 48
2.5 Advanced Dynamics 49
2.5.1 Kinematics of Rigid Body 49
2.5.2 Linear and Angular Momentums of Rigid Body 58
2.5.3 Euler Equations of Rigid Body 59
2.5.4 Lagrange Equations 60
3 Surface Forces and Interface Interactions 65
3.1 Introduction 65
3.2 Contact Between Two Solid Surfaces 65
3.2.1 Description of Surfaces 65
3.2.2 Contact Mechanics of Two Solid Surfaces 67
3.3 Forces Between Two Solid Surfaces 72
3.3.1 Adhesion 72
3.3.1.1 Solid-Solid Adhesion 72
3.3.1.2 Liquid-mediated Adhesion 76
3.3.2 Friction 79
3.3.3 Nanoscale Contact and Friction 84
4 Nanoscale Dynamics of Air-bearing Slider in Computer Hard Disk Drives 99
4.1 Introduction 99
4.1.1 Modern Hard Disk Drive 99
4.1.2 Head-disk Interface 99
4.1.3 Microsystem-based Active Slider Technology 101
4.2 Dynamics of ABS in Sub-5-nm Clearance Regime 104
4.2.1 Nonlinear Dynamics of Slider in Sub-5-nm Clearance Regime 104
4.2.2 Multiple Interface Forces and System Modeling 106
4.2.2.1 Air-bearing Slider Contact Model 108
4.2.2.2 Intermolecular Force 110
4.2.2.3 Electrostatic Force 111
4.2.2.4 Meniscus Forces 114
4.2.3 Nonlinear Dynamics Due to Nonlinear Air-bearing Stiffness and Vibro-impact 115
4.3 Microsystem-based Active Slider Dynamics 119
4.3.1 Microsystem-based Active Thermal Flying-height Control Slider 119
4.3.2 Nanoscale Dynamics Sensing, Identification and Diagnosis 134
4.3.3 Active Control of Microsystem-based-slider Vibrations 147
4.3.4 Characterization of Dynamic Performance of Lubricant in Head-Disk Interface Using Molecular Dynamics 161
5 Microdynamics of Lithium-ion Batteries 177
5.1 Multiscale Systems in Lithium-ion Batteries 177
5.1.1 Modern Lithium-ion Batteries 177
5.1.2 Multiscale Characterizations of LIBs 177
5.2 Microstructure and Microstructural Dynamics of LIBs 180
5.2.1 Microstructure and Multiphysics System 180
5.2.2 Modeling of Dynamics of LIBs 186
5.2.2.1 Equivalent Circuit Models 187
5.2.2.2 Electrochemical Model 189
5.2.3 Microstructural Dynamics of Particles in LIBs 191
5.3 Acoustic Emission Diagnosis of Microscale Damages of LIBs 196
5.3.1 Detection of Damages in LIBs Using AE Testing 196
5.3.2 Evaluation of Microcracking in LIBs 197
5.3.3 Diagnosis and Identification of Microscale Damages of LIBs 202
6 Dynamics of Actuator in Microsystems 213
6.1 Introduction 213
6.2 MEMS Actuators 213
6.2.1 Structures of MEMS Actuators 213
6.2.2 Electrostatically and Thermally Actuated Devices 213
6.3 Modeling MEMS Structure and Solution 219
6.4 Effects of Surface Forces and Surface Roughness on MEMS Actuators 226
6.5 System Control of MEMS Actuators and Nonlinear Analysis 233
6.6 Research and Development of Emerging MEMS 242
References 253
Index 259
In this introductory chapter, the concepts of microsystems, dynamics/vibrations, and microsystem dynamics are described. Then the significance of microsystem dynamics in engineering, science, and everyday life is presented. In the last section, the organization of the book is introduced.
Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as sensing and actuation. Typical microsystems have both mechanical and electrical parts, like read-write heads in computer storage devices, or bending cantilevers in atomic force microscopes [1-13].
Vibration studies the oscillatory motion of an object around an equilibrium point and the forces associated with it. The oscillations may be periodic or random. The associated forces may be linear or nonlinear. Vibration is usually detrimental, and occasionally "desirable" for engineering systems. Dynamics studies the movement of systems of interconnected bodies under the action of external forces. For rigid-body dynamics, the moving bodies are assumed to be rigid, which simplifies the analysis by reducing the parameters that describe the configuration of the system to the translation and rotation of reference frames attached to each body. The dynamics of a rigid body system are defined by its equations of motion, which are derived using either Newton-Euler equations or Lagrangian equations. The dynamics of a flexible body system or structural dynamics have general dynamical equations of motions, including stress and strain relations.
Unlike most conventional engineering systems, in microsystems, surface-related forces play significant roles and are not ignorable compared with body forces. A microsystem with moving parts functionally operates with varied movements and thus involves vibrations and dynamics. Numerous models have been developed for varied microsystems under individual conditions. Microsystems and vibration/dynamics used to be two distinct fields. However, with the recent rapid developments in dynamical microsystems - especially the extensive applications of dynamical microsystems in IT hardware, telecommunications, biomedical technology, manufacturing and robotic systems, transportation, and aerospace, engineers are turning to combining microsystem and dynamics/vibrations for integrated and efficient methods to handle and analyze the vast amounts of practical cases.
This book, Microsystem Dynamics, offers a combined treatment of the modeling, analysis, and testing of many problems that application engineers are trying to solve. After delineating these mathematical characterizations, it presents several applications in use today for analyzing microsystem dynamics. Emphasis is put on the contemporary knowledge and perspectives of microsystem dynamics.
Several decades have passed since the discovery and development of microsystems. Microsystem technology is beginning to explode with extensive applications.
Varied microsystems are used in numerous scientific and engineering systems and our everyday life. Just to name a few: active sliders in computer hard disk drives; accelerometers and pressure sensors in vehicles; lithium-ion batteries in electric vehicles; micromirrors in TVs; radiofrequency switches and MEMS microphones in cell phones; varied microactuators, such as MEMS valves, pumps, and microfluidics; electrical and optical relays and switches; MEMS grippers, tweezers, and tongs; MEMS linear and rotary motors; inkjet printer heads; microvehicles (e.g. microaircraft, microcars). After several decades of development, the fabrication methods of bulk and surface micromachining for microsystems are now matured and almost standardized.
The examples of microsystem dynamics phenomena cover numerous mechanisms in science and engineering. Even in laptops, we rely on dynamic microsystems for data storage and retrieval. Microsystem dynamics extend beyond engineering applications, it includes numerous phenomena in science and nature. This book considers microsystem dynamics in its broader meaning yet concentrates on fundamentals and engineering applications.
To give some examples of the problems treated in the book, let's consider the immense efforts that are being put into dealing with microsystem dynamics in the information storage industry, lithium-ion battery industry, and microactuator industry.
We are living in an information age. The needs for information storage systems are tremendously high and ever-increasing. There are a variety of information storage systems with varying degrees of development and commercialization. To date, magnetic information storage technology, particularly hard disk drives, is the most widely used. We are all familiar with computers in which the hard disk is one of key components. The worldwide hard disk drive revenue had reached $50 billion. Magnetic hard disk drives are based on the same fundamental principles of magnetic recording which involves a recording head and a recording medium. The former is on a suspension-supported slider, while the latter is on a spinning disk. The slider is flying on the spinning disk with the air gap. The operation of the hard disk drive is based on a self-pressurized air-bearing between the slider and the spinning disk, which maintains a constant separation called flying height. The state-of-the-art flying height is on the order of below 10 nm, while the relative speed between the slider and disk is extremely high (20 m/s or higher). The mechanical spacing between the slider and the disk must be further reduced to less than 2 nm to achieve an areal density beyond 1 Tbit/in2. In these regimes, microsystem dynamics have been the most challenging and critical problem for the products. On the other hand, over the last decade, the microsystem dynamics technique have been one of the most important techniques to advance slider disk interface and hard disk drive technology.
Rechargeable lithium-ion batteries (LIBs) have been used for a wide variety of applications from small-scale portable electronics to massive-scale energy storage systems. Particularly, electric vehicle battery building has been booming worldwide for the last several years. The market value of the LIBs industry was about $55 billion in 2023. With the enhanced demand for LIBs, experts predict this market will grow steadily, with a compound annual growth rate of around 20% from 2024 to 2030. A typical LIB cell is made up of an anode, cathode, separator, electrolyte, and two current collectors (positive and negative). The anode and cathode (both with thickness between 50 and ) store the lithium. The electrolyte carries positively charged lithium ions from the anode to the cathode and vice versa through the separator. The movement of the lithium ions creates free electrons in the anode which creates a charge at the positive current collector. The electrical current then flows from the current collector through a device being powered (cell phone, computer, vehicle motor, etc.) to the negative current collector. The separator (with a thickness between 20 and ) blocks the flow of electrons inside the battery. While LIB is discharging and providing an electric current, the anode releases lithium ions to the cathode, generating a flow of electrons from one side to the other. When plugging in the used LIB to the electrical grid for charging, the opposite happens: lithium ions are released by the cathode and received by the anode. However, the existing problems of LIBs limit their reliable applications in vehicles due to the stringent safety standards. The limitations of current battery technology include underutilization, capacity fade, thermal runaway, stress-induced fracture, and microscale material damage. To overcome these challenges, understanding the complex multiphysics and multiscale dynamics of LIBs is indispensable.
Microactuators or MEMS actuators are devices that convert electrical energy to mechanical motion, which comprise more than 50% of the rapidly growing microsystems/MEMS market which has a worldwide revenue of about $20 billion. Microactuators are widely used in science and engineering. Examples include variable capacitors, microrelays for low-power VLSI, optical phase shifters, next-generation displays, microgrippers for robotic surgery, and focusing mechanisms for cameras in mobile devices. There are various microactuators using different dynamical systems, which are characterized by microsystem dynamics with various electrostatic, thermal, piezoelectric, and magnetic features.
Understanding the nature of microsystem dynamics and solving the technological problems associated with microsystem dynamics are the essence of these fields.
Modeling of microsystem dynamics in engineering and scientific systems requires an accurate description of microsystems and dynamics. Unfortunately, this is extremely challenging as it involves complex surface phenomena in microscales. On the other hand, the resultant vibrations and dynamics in microsystems often exhibit various nonlinear, nonstationary, and uncertain features due to complex surface or interfacial forces. Moreover, small changes in interfacial parameters could have significant effect on the resultant vibrations and dynamics, thus, the scales of influencing factor span from macro-, micro-, to nanometer levels. The boundary condition of the problems is not fixed or given in prior, it is dependent on environmental...
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