Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.
Sprache
Verlagsort
Verlagsgruppe
Illustrationen
XXII, 468 p. 252 illus., 157 illus. in color.
Dateigröße
ISBN-13
978-1-4419-7276-7 (9781441972767)
DOI
10.1007/978-1-4419-7276-7
Schweitzer Klassifikation
Fabrication technologies for ultra-thin chips.- Post-processing techniques and issues.- Properties of ultra-thin chips; Applications.
