Seco ndary Ion Mass Spectrometry Basic Concepts, Instrumental Aspects, Applications and Trends (Volume 86 in Chemical Analysis: A Series of Monographs on Analytical Chemistry and Its Applications) A. Benninghoven, F. G. Rudenauer, and H. W. Werner "[This book] is (and probably will be for a long time ahead) the standard book on secondary ion mass spectrometry." - Trends in Analytical Chemistry "This is a monumental work, and contains nearly 600 illustrations and over 2,000 references covering nearly all the essential published information up to 1985. The book will certainly find its place as a reference work in most laboratories using this methodology" - Analytica Chimica Acta 1987 (0 471-01056-1) 1,227 pp. Secondary Ion Mass Spectrometry Proceedings of the Sixth International Conference on Secondary Ion Mass Spectrometry (SIMS VI) Edited by A. Benninghoven, A.M. Huber, and H. W. Werner "The international SIMS conferences have been held every two years since 1977.
They are recognized as one of the major forums for scientists, instrument manufacturers, and other researchers actively engaged in this rapidly expanding field this volume is a valuable account of the latest advances in the field of SIMS, and of the research trends of some of the most respected experts in the field. it is recommended for the libraries of all academic and industrial institutions where SIMS research is ongoing. it should prove a valuable reference source for years to come." - Applied Spectroscopy 1988 (0 471-91832-6) 1,078 pp.
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978-0-471-51945-4 (9780471519454)
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About the authors Robert G. Wilson is a scientist at Hughes Research Laboratories, Malibu, California, whose staff he joined in 1963. Previously, he worked for Rockwell/Rocketdyne and Battelle Memorial Institute. He is the author of Ion Beams with Applications (Wiley, 1973) and lon Mass Spectra (Wiley, 1974). Dr. Wilson received a PhD in physics from Ohio State University in 1961. Fred A. Stevie is a member of the technical staff at AT&T Bell Laboratories, Allentown, Pennsylvania, where he has worked since 1973. He is a member of the American Vacuum Society, the American Society for Mass Spectrometry, and the Microbeam Analysis Society. Mr. Stevie received an MS in physics from Vanderbilt University in 1970. Charles W. Magee is a cofounder of Evans East, Inc. in Plainsboro, New Jersey, a commercial materials laboratory specializing in surface, thin--film, and trace element analysis. For fourteen years he was a member of the technical staff at the David Sarnoff Research Center (formerly RCA Laboratories). Dr. Magee holds two U.S. patents, he has written over 100 publications, and he has presented more than 50 invited lectures. Dr. Magee is an associate editor of the Journal of Vacuum Science and Technology (B), and he is the recipient of the Peter Mark Memorial Award of the American Vacuum Society (1982), and of the Young Author Award of the Solid State Science and Technology Division of the Electrochemical Society (1979). He has twice won RCA Laboratories' Outstanding Achievement Awards for his work in secondary ion mass spectrometry (in 1982, as an individual effort, and, in 1976, for a team effort with William L. Harrington). Dr. Magee received a PhD in analytical chemistry from the University of Virginia in 1973.
ANALYSIS CONDITIONS. Primary Beam. Primary Beam Energy. Angle of Incidence. Sputtering Rate. Detected Area. Species Monitored. End Point. Energy Distribution. PROFILE ISSUES. Ion Beam Mixing and Depth Resolution. Segregation and Charge Driven Diffusion. Matrix Effects. Surface Effects. Particulates. Crate Shape. Microtopography. Memory Effect. Count Rate Saturation. Sample Location and Mounting. Mass Interferences. QUANTIFICATION. Procedure. Calibration Using Ion Implantation. Systematic Trends in RSFs. SPECIFIC APPLICATIONS. Bulk Analysis. Metals and Rough Surfaces. Insulators. Interfaces. Multilayers. Residual Gas Elements. Small Areas. Major Elements. Appendices. Index.