Secondary Ion Mass Spectrometry

Secondary ion mass spectrometry is developing into one of the most effective methods of characterizing the composition and chemical state of the surface and sub-surface layers of solid materials. This book attempts to provide an overview of the phenomenology, technology and application of this method as a technique for materials analysis. The text explains the basic physical and chemical principles and introduces theories which have been developed to explain the process. It also covers emergent techniques such as sputtered neutral mass spectrometry and laser microprobe and plasma desorption mass spectrometry. The author outlines the practical benefits and pitfalls which may arise and features many practical examples to illustrate the application of secondary ion mass spectrometry to real problems.