Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Rezensionen / Stimmen
"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."
T Mulvey, Measurement Science and Technology. 11, No12, December 2000
Reihe
Auflage
Sprache
Verlagsort
Verlagsgruppe
Zielgruppe
Für Beruf und Forschung
Research
Editions-Typ
Illustrationen
Maße
Höhe: 235 mm
Breite: 155 mm
Dicke: 30 mm
Gewicht
ISBN-13
978-3-642-08372-3 (9783642083723)
DOI
10.1007/978-3-540-38967-5
Schweitzer Klassifikation
Autor*in
Freier Redakteuer; freier Lektor
Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.
