This book focuses on enabling technologies that facilitate designing, machining, and manufacturing of micro/nano systems used in different domains: electrical, mechanical, thermal, magnetic, optic, fluidic. It covers theories and practices relevant to areas of micro-systems to improve the industrial performance and reliability of integrated circuits, micro/nanosystems, micro actuators, and micro/nano sensors.
Reihe
Sprache
Verlagsort
Zielgruppe
Für Beruf und Forschung
US School Grade: College Graduate Student
Illustrationen
50 farbige Abbildungen
50 Illustrations, color
Maße
Höhe: 240 mm
Breite: 170 mm
ISBN-13
978-3-11-142462-0 (9783111424620)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Klassifikation
Ankit D. Oza, Anand Y. Joshi, Parul University, India; Paulo Davim, University of Aveiro, Portugal
