This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
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ISBN-13
978-0-8194-3052-6 (9780819430526)
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Schweitzer Klassifikation
Introduction to the use of statistical process control in lithography; sampling; simple and complex processes; linewidth control; overlay; yield; process drift and automatic process control; metrology; control of operations.
