Part 1 Introduction: electro-active materials; capacitance micrometry; nanomechanisms. Part 2 Accuracy, trueness and precision: the co-ordinate system; position measurement; positioning. Part 3 Servo control: static control; dynamic performance. Part 5 Capacitance sensors: long- and short-range micrometers; capacitance measurement considerations; practical capacitors; noise; using sensors. Part 6 Piezos: some properties of piezo materials, practical actuators. Part 7 Nanometre precision mechanisms: design philosophy; specifications and performance measurement; using nanomechanisms; true position measurement.
