This volume is devoted to the physics, instrumentation and analytical methods of secondary ion mass spectroscopy (SIMS) in relation to solid surfaces.
It describes modern models of secondary ion formation and the factors influencing sensitivity of measurements and the range of applications. All the main parts of SIMS instruments are discussed in detail. Emphasising practical applications the book also considers the methods and analytical procedures for constitutional analysis of solids --- including metals, semiconductors, organic and biological samples. Methods of depth profiling, spatially multidimensional analysis and study of processes at the surface, such as adsorption, catalysis and oxidation, are given along with the application of SIMS in combination with other methods of surface analysis.
Sprache
Verlagsort
Verlagsgruppe
Zielgruppe
Für höhere Schule und Studium
Für Beruf und Forschung
This book will be of interest to fundamental and industrial researchers, and SIMS instrument users, in the fields of microelectronics, metallurgy, analytical chemistry and surface physics.
Maße
Höhe: 234 mm
Breite: 156 mm
Gewicht
ISBN-13
978-90-6764-078-7 (9789067640787)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Klassifikation
Preface -- Chapter 1. Physics olsecondary ion emIssion -- 1.1. Parameters of secondary ion emission -- 1.2. Effect of the primary ion energy and current on SIE -- 1.3. Effect of the target temperature on the SIE coefficient -- 1.4. Angular dependence of secondary ion emission -- 1.5. Secondary ion energy distribution -- 1.6. Effect of primary ions and target material on secondary ion yield -- 1.7. Effect of sample oxidation on STE -- 1.8. Polyatomic ion emission -- 1.9. Mechanism of ionization of ejected atoms References -- Chapter 2. SIMS instrumentation -- 2.1. Ion sources -- 2.2. Mass separation of primary beam -- 2.3. Primary and secondary ion optics -- 2.4. Mass spectrometers -- 2.5. Ion detection and vacuum systems -- 2.6. Mass-spectral microscopes -- 2.7. Ion microprobes References -- Chapter 3. Constitutional analysis of solids by SIMS -- 3.1. Analytical characteristics of SIMS -- 3.2. Qualitative constitutional analysis -- 3.3. Physical background of quantitative analysis -- 3.4. Methods of quantitative analysis -- 3.5. Analysis of organic and biological samples -- 3.6. Standards and cross-calibration of instruments References -- Chapter 4. In-depth analysis -- 4.1. Technique of SIMS in-depth analysis -- 4.2. Study of thin films (vacuum condensates) -- 4.3. In-depth analysis of implantation profiles -- 4.4. Spatially multidimensional SIMS analysis References -- ChapterS. Study of processes at the surface -- 5.1. Adsorption and catalysis -- 5.2. Investigation of metal oxidation -- 5.3. Comparison of SIMS with other methods of surface analysis -- References -- Index.
