INTRODUCTION
ELECTRON DETECTION
Photoelectron Spectroscopy (XPS, UPS)
Auger Electron Spectroscopy (AES, SAM)
Electron Energy Loss Spectroscopy (EELS)
Low-energy Electron Diffraction (LEED)
Other Electron Detecting Techniques (AEAPS, IAES, INS, MQS, IETS)
ION DETECTION
Static Secondary Ion Mass Spectrometry (SSIMS)
Dynamic Secondary Ion Mass Spectrometry (SIMS)
Electron Beam and HF-Plasma Secondary Neutral Mass Spectrometry (SNMS)
Laser-SNMS
Rutherford Backscattering Spectroscopy (RBS)
Low Energy Ion Scattering (LEIS)
Elastic Recoil Detection Analysis (ERDA)
Nuclear Reaction Analysis (NRA)
Other Ion Detecting Techniques (ESD, ESDIAD, TDS, GDMS, FABMS, APFIM, POSAP)
PHOTON DETECTION
Total Reflection X-Ray Fluorescence Analysis (TXRF)
Energy-dispersive X-ray Spectroscopy (EDXS)
Grazing Incidence X-Ray Methods for Near-surface Structural Studies
Glow Discharge Optical Emission Spectroscopy (GD-OES)
Surface Analysis by Laser Ablation
Ion Beam Spectrochemical Analysis (IBSCA)
Reflection Absorption IR Spectroscopy (RAIRS)
Surface-enhanced Raman Scattering (SERS)
UV/VIS/IR Ellipsometry (ELL)
Other Photon Detecting Techniques (SXAPS, DAPS, IPES, BIS)
SCANNING MICROSCOPY
Atomic Force Microscopy (AFM)
Scanning Tunneling Microscopy (STM)
SUMMARY AND COMPARISON OF TECHNIQUES
SURFACE ANALYTICAL EQUIPMENT SUPPLIERS
REFERENCES
