Devoted to the basic research and industrial applications of the plasma and ion assisted surface modification and coatings, this book presents an up-to-date review of the recent research and developments in this field. The object of the conference was to provide a link between those devoted to basic research and the widespread and expanding applications of surface and thin film technology. The resulting proceedings provide a useful reference for further developments in plasma and particle beam assisted surface and thin film technology.
Devoted to the basic research and industrial applications of the plasma and ion assisted surface modification and coatings, this book presents an up-to-date review of the recent research and developments in this field. The object of the conference was to provide a link between those devoted to basic research and the widespread and expanding applications of surface and thin film technology. The resulting proceedings provide a useful reference for further developments in plasma and particle beam assisted surface and thin film technology.
Sprache
Verlagsort
Verlagsgruppe
Elsevier Science & Technology
Zielgruppe
Für höhere Schule und Studium
Für Beruf und Forschung
Maße
ISBN-13
978-0-444-89279-9 (9780444892799)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Klassifikation
Preface. Plasma Diagnostics. Biocompatible Materials. Plasma Assisted Chemical Vapour Deposition. Erosion and Corrosion. Polymers. Process Control. Ion Beam Technology - Modification and Mixing. Ion Beam Assisted Deposition. Thin Film Characterization. Sputtering. Electron Cyclotron Resonance. Amorphous Semiconducting Films. Substrate Treatment. Electrical Applications. Microelectronic Applications.
