Volume One of this set is an updated manual covering the theory and practice of X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) techniques for surface analysis. The text takes into account improvements in equipment, experimental procedures and data interpretation over the last few years. Volume Two reflects the rapid evolution of surface analysis techniques involving ion and neural spectroscopies. Sputtering techniques are comprehensively discussed in chapters covering instrumentation, theory, quantification, dynamic and static SIMS and various applications.
Auflage
Sprache
Verlagsort
Verlagsgruppe
Zielgruppe
Für höhere Schule und Studium
Für Beruf und Forschung
Editions-Typ
Illustrationen
Maße
Höhe: 223 mm
Breite: 150 mm
Gewicht
ISBN-13
978-0-471-97131-3 (9780471971313)
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Schweitzer Klassifikation
Volume One: Perspective on the Analysis of Surfaces and Interfaces; Instrumentation; Spectral Interpretation; Depth Profiling in AES and XPS; Quantification of AES and XPS; Applications of AES in Microelectronics; AES in Metallurgy; Applications of Electron Spectroscopy to Heterogeneous Catalysis; Applications of XPS in Polymer Technology; Uses of Auger Electron and Photoelectron Spectroscopies in Corrosion Science. Volume Two: A perspective on the analysis of surfaces and interfaces; instrumentation for SIMS; basic aspects of sputter depth profiling; quantitative analysis using sputtering techniques - secondary ion and sputtered neutral mass spectrometry; dynamic SIMS and its applications in microelectronics; static SIMS - surface analysis of organic materials; sputtered neutral mass spectrometry (SNMS); ion scattering spectroscopic techniques; medium energy ion scattering.