This volume reflects the rapid evolution of surface analysis techniques involving ion and neural spectroscopies. Sputtering techniques are comprehensively discussed in chapters covering instrumentation, theory, quantification, dynamic and static SIMS and various applications.
Auflage
Sprache
Verlagsort
Verlagsgruppe
Zielgruppe
Für höhere Schule und Studium
Für Beruf und Forschung
Editions-Typ
Illustrationen
343 illustrations, 13 halftones
Maße
Höhe: 223 mm
Breite: 150 mm
Gewicht
ISBN-13
978-0-471-96498-8 (9780471964988)
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Schweitzer Klassifikation
A perspective on the analysis of surfaces and interfaces; instrumentation for SIMS; basic aspects of sputter depth profiling; quantitative analysis using sputtering techniques - secondary ion and sputtered neutral mass spectrometry; dynamic SIMS and its applications in microelectronics; static SIMS - surface analysis of organic materials; sputtered neutral mass spectrometry (SNMS); ion scattering spectroscopic techniques; medium energy ion scattering.
