Handbook of Static Secondary Ion Mass Spectrometry

Part 1 Static secondary ion mass spectrometry for surface chemical characterization: the SIMS phenomenon; the experimental parameters; the SIMS experiment; experimental procedures used in acquisition of spectra. Part 2 Library of spectra. Part 3 Case studies: static SIMS in surface science; cleaning of semiconductor materials; SIMS imaging of the mechanism of oxide growth; the use of MS/MS techniques in materials analysis; SIMS imaging of semiconductor devices. (Part contents).