Laser-Assisted Microtechnology

1. Introduction.- 1.1 Laser-Assisted Thin-Film Micromachining.- 1.2 Laser-Assisted Microprocessing and Modification of Materials..- 1.3 Laser Micropatterning.- 1.4 Pulsed Laser-Plasma Deposition of Thin Films.- 2. Laser-Based Equipment for Microtechnology.- 2.1 Principal Design of Laser-Based Microtechnological Equipment.- 2.2 Lasers Used in Microtechnological Systems.- 2.3 Optical Arrangement of the Energy Beam Line.- 2.4 Laser-Beam Trajectory Control.- 2.5 Optical Arrangement of the Visual Channel.- 3. Laser Micromachining of Thin Films.- 3.1 Physics of Laser-Induced Thin-Film Treatment.- 3.2 Accuracy and Quality of Laser Thin-Film Micromachining.- 3.3 Technological Processes in Laser Thin-Film Machining.- 4. Local Laser-Induced Heat Treatment.- 4.1 Laser Heating of Absorbing Materials.- 4.2 Applications of Laser Heating.- 5. Laser Melting and Microwelding.- 5.1 Characteristics of the Laser-Induced Melting Process.- 5.2 Laser-Spot Microwelding.- 5.3 Laser Seam-Welding.- 5.4 Factors Affecting the Laser-Welding Results.- 6. Laser Microshaping.- 6.1 Laser Hole-Drilling.- 6.2 Laser-Driven Materials Separation.- 7. Maskless Laser Micropatterning.- 7.1 Thermochemical Methods for Laser Patterning.- 7.2 Photochemical Methods of Laser Patterning.- 8. Pulsed Laser-Plasma Deposition of Thin Films, and Film Structures.- 8.1 Essentials of the Pulsed-Laser Plasma-Deposition Technique.- 8.2 Characteristics of the Pulsed-Laser Plasma-Deposition Process.- 8.3 Typical Applications of the Pulsed-Laser Plasma-Deposition Method.- References.