An introduction to the current analytical methods and equipment used for the study of the high-purity gases employed by the semiconductor and other related industries. The information available in this title becomes important as the semiconductor industry continues to move towards gas-phase reagents and the need for greater purity. Individuals dealing with the manufacturing of these devices needs to understand the technology available for modern gas analysis and quality control. This text includes a brief history of related forms of gas analysis, guidelines for performing gas analysis, and the knowledge needed to best perform required evaluations of gas systems and procedures.
Sprache
Verlagsort
Zielgruppe
Für höhere Schule und Studium
Für Beruf und Forschung
Illustrationen
Maße
Gewicht
ISBN-13
978-1-56081-671-3 (9781560816713)
Schweitzer Klassifikation
The specialty gas industry; historical development of gas analysis; the path less taken - fruitless pursuits in speciality gas analysis; contemporary gas analysis - equipment and methods; future directions in the specialty gas field.
