Part 1 Introduction: Introduction to design for manufacturability of VLSI circuits (W. Maly). Part 2 Statistical Design - Theory: Introduction to parametric yield optimization (S.W. Director, K. Krishna P. Feldmann). Advanced yield optimization techniques, (K.J. Antreich, H.E. Graeb, R.K. Koblitz). Part 3 Statistical Design - Applications: Applications of statistical methods to IC design, (J.P. Spoto); Statistical worst-case analysis for integrated circuits (S.R. Nassif). Statistical analysis in VLSI process circuit design (P. Chattejee et al.). A simulation-based approach to parametric performance test development (J.B. Brockman, S.W. Director). Part 4 Characterization and Simulation of VLSI Manufacturing Process: Statistical simulation of modern industrial fabrication process (P.K. Mozumder, A.J. Strojwas). Advanced process identification techniques (C.J. Spanos).