Introduction to Microsystem Design
2nd Edition
Published on 25. June 2015
XXIV, 374 pages
978-3-662-47023-7 (ISBN)
Description
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
More details
Series
Edition
2nd ed. 2015
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Product notice
Reflowable
Illustrations
XXIV, 374 p. 380 illus., 332 illus. in color.
File size
21,06 MB
ISBN-13
978-3-662-47023-7 (9783662470237)
DOI
10.1007/978-3-662-47023-7
Schweitzer Classification
Other editions
Additional editions
Werner Karl Schomburg
Introduction to Microsystem Design
Book
07/2015
2nd Edition
Springer
€106.99
Shipment within 7-9 days
Previous edition
Werner Karl Schomburg
Introduction to Microsystem Design
E-Book
05/2011
1st Edition
Springer
€139.09
Available for download
Content
Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Electrical Measurements.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies of physical domains.- Mechanical devices for electronics.
