Introduction to Microsystem Design
1st Edition
Published on 30. May 2011
XXII, 322 pages
978-3-642-19489-4 (ISBN)
Description
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
More details
Series
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Product notice
Reflowable
Illustrations
XXII, 322 p.
File size
8,89 MB
ISBN-13
978-3-642-19489-4 (9783642194894)
DOI
10.1007/978-3-642-19489-4
Schweitzer Classification
Other editions
New editions
Werner Karl Schomburg
Introduction to Microsystem Design
E-Book
06/2015
2nd Edition
Springer
€96.29
Available for download
Additional editions
Werner Karl Schomburg
Introduction to Microsystem Design
Book
06/2011
Springer
€160.49
Article exhausted; check for reprint
Person
Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.
Content
Preface.- Notations and symbols.- Introduction.- Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies between physical domains.- Mechanical devices for electronics.- Pressure sensors.- Flow sensors.- Inertial sensors.
