Introduction to Microsystem Design
2nd Edition
Published on 8. July 2015
Book
Hardback
XXIV, 374 pages
978-3-662-47022-0 (ISBN)
Description
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
More details
Series
Edition
2nd ed. 2015
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Research
Edition type
Revised edition
Illustrations
332 farbige Abbildungen, 48 s/w Abbildungen
XXIV, 374 p. 380 illus., 332 illus. in color.
Dimensions
Height: 241 mm
Width: 160 mm
Thickness: 27 mm
Weight
764 gr
ISBN-13
978-3-662-47022-0 (9783662470220)
DOI
10.1007/978-3-662-47023-7
Schweitzer Classification
Other editions
Additional editions
Werner Karl Schomburg
Introduction to Microsystem Design
Book
10/2016
2nd Edition
Springer
€106.99
Shipment within 7-9 days
Werner Karl Schomburg
Introduction to Microsystem Design
E-Book
06/2015
2nd Edition
Springer
€96.29
Available for download
Previous edition
Werner Karl Schomburg
Introduction to Microsystem Design
Book
08/2013
Springer
€139.99
Article exhausted; check for reprint
Person
Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.
Content
Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Electrical Measurements.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies of physical domains.- Mechanical devices for electronics.