Fringe Pattern Analysis for Optical Metrology
Theory, Algorithms, and Applications
1st Edition
Published on 30. May 2014
344 pages
978-3-527-68110-5 (ISBN)
Description
The main objective of this book is to present the basic theoretical principles and practical applications for the classical interferometric techniques and the most advanced methods in the field of modern fringe pattern analysis applied to optical metrology. A major novelty of this work is the presentation of a unified theoretical framework based on the Fourier description of phase shifting interferometry using the Frequency Transfer Function (FTF) along with the theory of Stochastic Process for the straightforward analysis and synthesis of phase shifting algorithms with desired properties such as spectral response, detuning and signal-to-noise robustness, harmonic rejection, etc.
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Manuel Servin | J. Antonio Quiroga | Moises Padilla
Fringe Pattern Analysis for Optical Metrology
Theory, Algorithms, and Applications
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1st Edition
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Manuel Servin | J. Antonio Quiroga | Moises Padilla
Fringe Pattern Analysis for Optical Metrology - Theory, Algorithms, and Applications
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06/2014
Wiley-VCH
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Persons
Manuel Servin received his engineering diploma from the École Nationale Supérieure des Télécommunications in France (1982), and his Ph.D. from the Centro de Investigaciones en Óptica A. C. (CIO) at Leon Mexico in 1994. He is co-author of the book `Interferogram Analysis for Optical Testing?. Dr. Servin has published more than 100 papers in scientific peer-reviewed journals on Digital Interferometry and Fringe Analysis.
Juan Antonio Quiroga received his Ph.D. in physics in 1994 from the Universidad Complutense de Madrid, Spain. He is now teaching there at the Physics Faculty. His current principal areas of interest are Digital image processing applied to Optical Metrology and applied optics
Moises Padilla is a Ph.D. student in optical sciences at the Centro de Investigaciones en Óptica (CIO) at León Mexico. He is associated with the optical metrology division of the CIO. His research activities are in digital signal processing and electrical communication engineering applied to processing and analysis of optical interferogram images.
Juan Antonio Quiroga received his Ph.D. in physics in 1994 from the Universidad Complutense de Madrid, Spain. He is now teaching there at the Physics Faculty. His current principal areas of interest are Digital image processing applied to Optical Metrology and applied optics
Moises Padilla is a Ph.D. student in optical sciences at the Centro de Investigaciones en Óptica (CIO) at León Mexico. He is associated with the optical metrology division of the CIO. His research activities are in digital signal processing and electrical communication engineering applied to processing and analysis of optical interferogram images.
Content
Chapter 1 Digital Linear Systems
1.1 Introduction
1.2 Digital Sampling
1.3 Linear time-invariant (LTI) systems
1.4 Z-transform analysis of digital linear systems
1.5 Fourier analysis of digital linear systems
1.6 Convolution one-dimensional digital filters
1.7 Convolution two-dimensional linear filters
1.8 Linear regularized filtering techniques
1.9 Stochastic processes
1.10 Linear quadrature filters
Chapter 2 Synchronous Temporal Interferometry
2.1 Introduction
2.2 The temporal carrier interferometric signal
2.3 Quadrature linear filters for phase estimation
2.4 The minimum 3-step PSA
2.5 Least-squares PSAs
2.6 Detuning in temporal interferometry
2.7 Noise in temporal interferometry
2.8 Harmonics in temporal interferometry
2.9 Quadrature filters design by 1st-order building blocks
2.10 Some further topics in linear PSAs theory
Chapter 3 Asynchronous Temporal Interferometry
3.1 Introduction
3.2 Spectral analysis of the Carré algorithm
3.3 Spectral analysis of other self-tunable PSAs
3.4 Self-calibrating PSAs
Chapter 4 Spatial Methods with Carrier
4.1 Introduction
4.2 Linear spatial carrier
4.3 Circular spatial carrier interferogram
4.4 2D Pixelated Spatial Carrier
4.5 Regularized Quadrature Filters
4.6 Relation Between Temporal and Spatial Analysis
Chapter 5 Spatial Methods without Carrier
5.1 Introduction
5.2 Phase demodulation of closed-fringe interferograms
5.3 The Regularized Phase Tracker (RPT)
5.4 Local Robust Quadrature Filters 231
5.5 2D Fringe Direction
5.6 2D Vortex Filter
5.7 The General Quadrature Transform
Chapter 6 Phase Unwrapping
6.1 Introduction
6.2 Phase unwrapping with by 1D line integration
6.3 Phase unwrapping with 1D IIR filters
6.4 1D phase unwrapping with linear prediction
6.5 2D phase unwrapping with linear prediction
6.6 Least-squares method for phase unwrapping
6.7 Phase unwrapping through demodulation using a phase tracker
6.8 Smooth unwrapping with 2D detection of phase inconsistencies
6.9 Quality Maps and Branch Cut Methods
Appendix
List of linear phase-shifting algorithms (PSAs)
1.1 Introduction
1.2 Digital Sampling
1.3 Linear time-invariant (LTI) systems
1.4 Z-transform analysis of digital linear systems
1.5 Fourier analysis of digital linear systems
1.6 Convolution one-dimensional digital filters
1.7 Convolution two-dimensional linear filters
1.8 Linear regularized filtering techniques
1.9 Stochastic processes
1.10 Linear quadrature filters
Chapter 2 Synchronous Temporal Interferometry
2.1 Introduction
2.2 The temporal carrier interferometric signal
2.3 Quadrature linear filters for phase estimation
2.4 The minimum 3-step PSA
2.5 Least-squares PSAs
2.6 Detuning in temporal interferometry
2.7 Noise in temporal interferometry
2.8 Harmonics in temporal interferometry
2.9 Quadrature filters design by 1st-order building blocks
2.10 Some further topics in linear PSAs theory
Chapter 3 Asynchronous Temporal Interferometry
3.1 Introduction
3.2 Spectral analysis of the Carré algorithm
3.3 Spectral analysis of other self-tunable PSAs
3.4 Self-calibrating PSAs
Chapter 4 Spatial Methods with Carrier
4.1 Introduction
4.2 Linear spatial carrier
4.3 Circular spatial carrier interferogram
4.4 2D Pixelated Spatial Carrier
4.5 Regularized Quadrature Filters
4.6 Relation Between Temporal and Spatial Analysis
Chapter 5 Spatial Methods without Carrier
5.1 Introduction
5.2 Phase demodulation of closed-fringe interferograms
5.3 The Regularized Phase Tracker (RPT)
5.4 Local Robust Quadrature Filters 231
5.5 2D Fringe Direction
5.6 2D Vortex Filter
5.7 The General Quadrature Transform
Chapter 6 Phase Unwrapping
6.1 Introduction
6.2 Phase unwrapping with by 1D line integration
6.3 Phase unwrapping with 1D IIR filters
6.4 1D phase unwrapping with linear prediction
6.5 2D phase unwrapping with linear prediction
6.6 Least-squares method for phase unwrapping
6.7 Phase unwrapping through demodulation using a phase tracker
6.8 Smooth unwrapping with 2D detection of phase inconsistencies
6.9 Quality Maps and Branch Cut Methods
Appendix
List of linear phase-shifting algorithms (PSAs)
