Run-to-Run Control in Semiconductor Manufacturing
Published on 8. October 2018
368 pages
978-1-4200-4066-1 (ISBN)
Description
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
More details
Language
English
Place of publication
Baton Rouge
United States
Publishing group
Taylor & Francis Inc
Target group
Professional and scholarly
Illustrations
27 s/w Tabellen
27 Tables, black and white
File size
6,66 MB
ISBN-13
978-1-4200-4066-1 (9781420040661)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions
A. M. Hurwitz | James Moyne | Duane Boning
Run-to-Run Control in Semiconductor Manufacturing
Book
11/2000
1st Edition
CRC Press
€229.03
Shipment within 15-20 days
Persons
James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Content
Introduction. Background. Identifying Target Applications for Run-to-Run Control. Developing a Run-to-Run Solution: Run-to-Run Algorithms. Developing a Run-to-Run Solution: Practical Extensions to Algorithms. Developing and Deploying Run-to-Run Solutions: Integrating Control. Run-to-Run Control System Deployment Case Studies. Advanced Topics. Conclusions. References.
