Run-to-Run Control in Semiconductor Manufacturing
1st Edition
Published on 8. October 2018
368 pages
978-1-351-83612-8 (ISBN)
Description
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
More details
Edition
1. Auflage
Language
English
Place of publication
London
United Kingdom
Publishing group
Taylor & Francis Ltd
Target group
Professional and scholarly
Product notice
Reflowable
Illustrations
27 Tables, black and white
ISBN-13
978-1-351-83612-8 (9781351836128)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions
A. M. Hurwitz | James Moyne | Duane Boning
Run-to-Run Control in Semiconductor Manufacturing
Book
11/2000
1st Edition
CRC Press
€229.03
Shipment within 15-20 days
Persons
James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Editor
University of Michigan, Ann Arbor, USA
Pennsylvania State University, University Park, USA
Friendswood, Texas, USA
Contributions
National Taiwan University
Massachusetts Institute of Technology, Massachusetts, USA
Massachusetts Institute of Technology, Massachussetts, USA
National Taiwan University, Taipei, Taiwan
Content
Introduction. Background. Identifying Target Applications for Run-to-Run Control. Developing a Run-to-Run Solution: Run-to-Run Algorithms. Developing a Run-to-Run Solution: Practical Extensions to Algorithms. Developing and Deploying Run-to-Run Solutions: Integrating Control. Run-to-Run Control System Deployment Case Studies. Advanced Topics. Conclusions. References.
