Microsystem Technology
1st Edition
Published on 11. July 2008
XII, 500 pages
978-3-527-61301-4 (ISBN)
Description
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Reviews / Votes
"...written by excellent experts in the field and gives a very deep and wide introduction to this important technology. The Text includes may practical examples already realized, and many details for the fabrication processes are explained. I can recommend this book without any restrictions tp engineers as well as physicists, and other scientists in this field." OptikMore details
Other editions
Additional editions
Wolfgang Menz | Jürgen Mohr | Oliver Paul
Microsystem Technology
Book
01/2001
1st Edition
Wiley-VCH
€245.00
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Persons
Wolfgang Menz is the author of Microsystem Technology, published by Wiley.
Jürgen Mohr is the author of Microsystem Technology, published by Wiley.
Oliver Paul is the author of Microsystem Technology, published by Wiley.
Content
General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology
