Microsystem Technology
1st Edition
Published on 16. January 2001
Book
Hardback
XII, 500 pages
978-3-527-29634-7 (ISBN)
Description
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Reviews / Votes
"The literature is up to date and the index is broad. It is well presented with diagrams, drawings and excellent micrographs that attract the reader and also explain the subjects visually." (Materials World, November 2001) "...covers the basic concepts in the field and recent trends in the discipline..." (SciTech Book News, Vol. 26, No. 2, June 2002)More details
Edition
1., Auflage
Language
English
Place of publication
Weinheim
Germany
Target group
Professional and scholarly
Ingenieure für Elektrotechnik, Materialwissenschaftler, Halbleiterphysiker, Halbleiterindustrie, Elektrotechnische Industrie
Edition type
Revised edition
Illustrations
400
20 s/w Tabellen, 400 s/w Abbildungen
Illustrations
Dimensions
Height: 24 cm
Width: 17 cm
Thickness: 29 mm
Weight
1106 gr
ISBN-13
978-3-527-29634-7 (9783527296347)
Schweitzer Classification
Other editions
Additional editions
Wolfgang Menz | Jürgen Mohr | Oliver Paul
Microsystem Technology
E-Book
07/2008
1st Edition
Wiley-VCH
€219.99
Available for download
Content
General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology