Silicon Devices
Structures and Processing
1st Edition
Published on 20. November 2008
VIII, 202 pages
978-3-527-61179-9 (ISBN)
Description
Silicon is the most important material for the electronics industry. In modern microelectronics silicon devices like diodes and transistors play a major role, and devices like photodetectors or solar cells gain ever more importance. This concise handbook deals with one of the most important topics for the electronics industry. World renowned authors have contributed to this unique overview of the processing of silicon and silicon devices.
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10/1998
Wiley-VCH
€119.00
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Content
SILICON PROCESSING
Single Crystal Silicon
Czochralski Silicon
Crystal Engineering
SILICON DEVICE STRUCTURES
Potential-Effect Devices
Field-Effect Devices
Quantum-Effect Devices
Photonic Diodes
SILICON DEVICE PROCCESSING
Gettering
Device Isolation
Junction Formation
Metallization
Cluster Tool Technology
Single Crystal Silicon
Czochralski Silicon
Crystal Engineering
SILICON DEVICE STRUCTURES
Potential-Effect Devices
Field-Effect Devices
Quantum-Effect Devices
Photonic Diodes
SILICON DEVICE PROCCESSING
Gettering
Device Isolation
Junction Formation
Metallization
Cluster Tool Technology
