Silicon Devices
Structures and Processing
Published on 26. October 1998
Book
Hardback
VIII, 202 pages
978-3-527-29595-1 (ISBN)
Description
This handbook covers the field of silicon devices and processing. It covers both academic and industrial aspects.
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Other editions
Additional editions
E-Book
11/2008
1st Edition
Wiley-VCH
€115.99
Available for download
Content
Silicon Processing: Single Crystal Silicon; Czochralski Silicon; Crystal Engineering; Silicon Device Structures: Potential-Effect Devices; Field-Effect Devices; Quantum-Effect Devices; Photonic Diodes; Silicon Device Proccessing: Gettering; Device Isolation; Junction Formation; Metallization; Cluster Tool Technology.