
Science and Technology of Microfabrication: Volume 76
Cambridge University Press
Published on 5. June 2014
Book
Paperback/Softback
394 pages
978-1-107-41116-6 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
Cambridge
United Kingdom
Target group
College/higher education
Professional and scholarly
Product notice
Paperback (trade)
Dimensions
Height: 229 mm
Width: 152 mm
Thickness: 21 mm
Weight
530 gr
ISBN-13
978-1-107-41116-6 (9781107411166)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions

R. E. Howard | E. L. Hu | S. Namba
Science and Technology of Microfabrication: Volume 76
Book
04/1987
Materials Research Society
€57.13
Article exhausted; check different version
Persons
Editor
AT&T Bell Laboratories, New Jersey
University of California, Santa Barbara
University of Osaka, Japan
Massachusetts Institute of Technology