
Science and Technology of Microfabrication: Volume 76
Materials Research Society (Publisher)
Published on 30. April 1987
Book
Hardback
978-0-931837-42-5 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
New York
United States
Target group
Professional and scholarly
Illustrations
Worked examples or Exercises
Weight
818 gr
ISBN-13
978-0-931837-42-5 (9780931837425)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions

R. E. Howard | E. L. Hu | S. Namba
Science and Technology of Microfabrication: Volume 76
Book
06/2014
Cambridge University Press
€28.46
Article exhausted; check different version
Persons
Editor
AT&T Bell Laboratories, New Jersey
University of California, Santa Barbara
University of Osaka, Japan
Massachusetts Institute of Technology