Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Published on 23. August 2014
Book
Paperback/Softback
XIII, 394 pages
978-3-662-31169-1 (ISBN)
Description
With contributions by numerous experts
More details
Series
Edition
Softcover reprint of the original 1st ed. 1983
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Research
Illustrations
XIII, 394 p.
Dimensions
Height: 229 mm
Width: 152 mm
Thickness: 23 mm
Weight
594 gr
ISBN-13
978-3-662-31169-1 (9783662311691)
DOI
10.1007/3-540-12593-0
Schweitzer Classification
Other editions
Additional editions
R. Behrisch
Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Book
10/1983
Springer
€85.59
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Content
and overview.- Sputtering of multicomponent materials.- Chemical sputtering.- Sputtering by electrons and photons.- Sputtering of solids with neutrons.- Heavy ion sputtering induced surface topography development.- Development of surface topography due to gas ion implantation.