Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Published on 1. October 1983
Book
Hardback
XIII, 394 pages
978-3-540-12593-8 (ISBN)
Description
With contributions by numerous experts
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R. Behrisch
Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Book
08/2014
Springer
€53.49
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Content
and overview.- Sputtering of multicomponent materials.- Chemical sputtering.- Sputtering by electrons and photons.- Sputtering of solids with neutrons.- Heavy ion sputtering induced surface topography development.- Development of surface topography due to gas ion implantation.