Sputtering by Particle Bombardment I
Physical Sputtering of Single-Element Solids
Published on 23. August 2014
Book
Paperback/Softback
XI, 284 pages
978-3-662-30888-2 (ISBN)
Description
With contributions by numerous experts
More details
Series
Edition
Softcover reprint of the original 1st ed. 1981
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Research
Illustrations
19 s/w Abbildungen
XI, 284 p. 19 illus.
Dimensions
Height: 235 mm
Width: 155 mm
Thickness: 17 mm
Weight
458 gr
ISBN-13
978-3-662-30888-2 (9783662308882)
DOI
10.1007/3-540-10521-2
Schweitzer Classification
Other editions
Additional editions
Book
08/1981
Springer
€85.59
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Content
and overview.- Sputtering by ion bombardment theoretical concepts.- Theoretical aspects of monocrystal sputtering.- Sputtering yield measurements.- Sputtering yields of single crystalline targets.