Sputtering by Particle Bombardment I
Physical Sputtering of Single-Element Solids
Published on 1. August 1981
Book
Hardback
XI, 284 pages
978-3-540-10521-3 (ISBN)
Description
With contributions by numerous experts
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Book
08/2014
Springer
€53.49
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Content
and overview.- Sputtering by ion bombardment theoretical concepts.- Theoretical aspects of monocrystal sputtering.- Sputtering yield measurements.- Sputtering yields of single crystalline targets.