
Micro Process Engineering - Fundamentals, Devices, Fabrication, and Applications
Norbert Kockmann(Editor)
Wiley-VCH (Publisher)
Published on 29. February 2008
Software
Other digital
529 pages
978-3-527-61674-9 (ISBN)
More details
Language
English
Place of publication
Weinheim
Germany
Target group
Professional and scholarly
Dimensions
Height: 245 mm
Width: 186 mm
Thickness: 31 mm
Weight
1126 gr
ISBN-13
978-3-527-61674-9 (9783527616749)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions

E-Book
03/2013
1st Edition
Wiley-VCH
€86.99
Available for download
Persons
Editor
University of Freiburg, Germany
Series Editor
Georgia Institute of Technology, Atlanta, USA
Carnegie Mellon University, Pittsburgh, USA
ETH Zurich, Switzerland
IMTEK Freiburg, Germany
Kyoto University, Kyoto, Japan