BACUS Symposium on Photomask Technology 1995-2000
SPIE Press
Published on 1. May 2001
Software
CD-ROM
978-0-8194-3845-4 (ISBN)
More details
Series
Language
English
Place of publication
Bellingham
United States
Target group
Professional and scholarly
ISBN-13
978-0-8194-3845-4 (9780819438454)
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Schweitzer Classification
Person
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