Vacuum Microelectronics

Preface ix List of Contributors xiii 1. Historical Overview 1 Takao Utsumi 1.1 Introduction 1 1.2 Shoulders' Proposal 1 1.3 Groundbreaking Work 2 1.4 Invention of Spindt Cathode 4 1.5 Field Emitter Arrays 5 1.6 New Cathode Materials 6 1.7 Future 7 Dedication 9 References 9 2 Technological Overview 13 Gregory P. Kochanski, Wei Zhu, and Yehuda Goren 2.1 Introduction 13 2.2 Promise and Reality 14 2.3 Case Studies 15 2.4 Outlook 30 References 31 3 Theory of Field Emission 33 Kevin L. Jensen 3.1 Introduction 33 3.2 One-Dimensional Tunneling Theory: Metals 35 3.3 Emission from Multi-Dimensional Structures 69 3.4 Conclusion 97 Acknowledgments 98 References 98 4 Spindt Field Emitter Arrays 105 Charles A. (Capp) Spindt, Ivor Brodie, Christopher E. Holland and Paul R. Schwoebel 4.1 Introduction 105 4.2 A Brief History of the Spindt Cathode 106 4.3 Fabrication Technology 108 4.4 Performance 141 4.5 Applications and Ongoing Developments 179 4.6 Summary 181 Acknowledgments 181 References 182 5 Silicon Field Emitter Arrays 187 Jonathan Shaw and Junji Itoh 5.1 Introduction 187 5.2 Fabrication of Silicon FEAs 190 5.3 Free Electron Theory of Field Emission 199 5.4 Emission Characterization of Silicon FEAs 205 5.5 Local Circuit Elements 224 5.6 Summary 241 Dedication 242 References 242 6 Novel Cold Cathode Materials 247 Wei Zhu, Peter K. Baumann, and Christopher A. Bower 6.1 Introduction 247 6.2 Diamond Emitters 248 6.3 Carbon Nanotube Emitters 265 6.4 Other Cold Cathodes 274 6.5 Conclusion 280 References 280 7 Field Emission Flat Panel Displays 289 Heinz H. Busta 7.1 Introduction 289 7.2 Field Emission Displays 290 7.3 Other Display Technologies 334 7.4 Summary 341 Institutions Involved inFEDCommercialization 342 Acknowledgments 343 References 343 8 Cold Cathode Microwave Devices 349 R. Allen Murphy and Mary Anne Kodis 8.1 Introduction 349 8.2 Microwave Amplifiers 350 8.3 Field Emitter Arrays 355 8.4 Characteristics of FEA-Cathode Microwave Tubes 381 8.5 Future Work 385 References 386 Index 393