
Principles of Semiconductor Processes and Device Technology
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Persons
Qingkai Qian (Associate Professor) received his B.S. and M.S. degrees, both in physics from Tsinghua University, Beijing, China, in 2012 and 2014, respectively. He obtained his Ph.D. degree in electronic and computer engineering from the Hong Kong University of Science and Technology, Hong Kong SAR, China in 2018. He was as a postdoctoral researcher in Department of Electrical Engineering, The Pennsylvania State University from 2019 to 2020. He joined College of Optoelectronic Engineering, Chongqing University in 2021, and currently is an Associate Professor. His research interests are the optoelectronic devices based on perovskites, low-dimensional materials, and their related optical property investigations based on first-principle calculations. He is currently young editorial board member of Rare Metals and Vacuum.
Content
1.1 Introduction
1.2 Properties of Semiconductors
1.3 Crystal Structure and Types of Semiconductors
1.4 Carrier Transport
1.5 Doping Process
1.6 Energy Band Theory
1.7 PN Junctions
CHAPTER 2: SYNTHESIS AND CHARACTERIZATION OF OPTOELECTRONIC MATERIALS
2.1 Introduction
2.2 Synthesis of Semiconductors
2.3 Characterization
CHAPTER 3: EUV LITHOGRAPHY PROCESS OF SEMICONDUCTOR DEVICES
3.1 Introduction
3.2 EUV Lithography System and Working Principles
3.3 Development of Resist for EUV Lithography
3.4 Mask Materials and Designs for EUV Lithography
3.5 Conclusions and Perspectives
CHAPTER 4: TRANSISTORS
4.1 Bipolar Transistors
4.2 Field-Effect Transistors
4.3 Thin-Film Transistors
CHAPTER 5: LUMINESCENT MATERIALS AND DEVICES
5.1 Introduction
5.2 Principle of Semiconductor Luminescence
5.3 Structure and Feature of LEDs
5.4 Process of LEDs
5.5 GaN LEDs
5.6 Perovskite LEDs
5.7 White LEDs
CHAPTER 6: SUPERLUMINESCENT LIGHT EMITTING DIODES
6.1 Introduction
6.2 History of SLED
6.3 Principle of Active-MMI SLED
6.4 Merit and Results of Active-MMI SLED
CHAPTER 7: SOLAR CELLS
7.1 Introduction
7. 2 Basic Principles of Solar Cells
7.3 Typical Solar Cells
7.4 Manufacturing of Solar Cells
7.5 Applications of Solar Cells
7.6 Conclusion
CHAPTER 8: PHOTODETECTORS
8.1 Introduction
8.2 Principle of Photodetectors
8.3 General Metrics of Photodetectors
8.4 Perovskite Photodetectors
8.5 Metal-Semiconductor-Metal Photodetectors
8.6 Organic Photomultiplication Detectors
CHAPTER 9: GRAPHENE AND GRAPHENE-BASED DEVICES
9.1 Introduction
9.2 Structure and Properties of Graphene
9.3 Preparation Methods of Graphene
9.4 Graphene-Based Devices
9.5 Future of Graphene-Based Devices
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