Design and Implementation of Large-Range Compliant Micropositioning Systems

Preface ix 1 Introduction 1 1.1 Micropositioning Techniques 1 1.2 Compliant Guiding Mechanisms 2 1.3 Actuation and Sensing 13 1.4 Control Issues 14 1.5 Book Outline 16 Part I Large-Range Translational Micropositioning Systems 23 2 Uniaxial Flexure Stage 25 2.1 Concept of MCPF 25 2.2 Design of a Large-Range Flexure Stage 28 2.3 Prototype Development and Performance Testings 40 2.4 Sliding Mode Controller Design 41 2.5 Experimental Studies 45 2.6 Conclusion 51 3 XY Flexure Stage 53 3.1 Introduction 53 3.2 XY Stage Design 55 3.3 Model Verification and Prototype Development 61 3.4 EMPC Control Scheme Design 65 3.5 Simulation and Experimental Studies 72 3.6 Conclusion 78 4 Two-Layer XY Flexure Stage 81 4.1 Introduction 81 4.2 Mechanism Design 82 4.3 Parametric Design 84 4.4 Experimental Studies and Results 92 4.5 Conclusion 102 Part II Multi-Stroke Translational Micropositioning Systems 105 5 Dual-Stroke Uniaxial Flexure Stage 107 5.1 Introduction 107 5.2 Mechanism Design and Analysis 108 5.3 Prototype Development and Open-Loop Testing 120 5.4 Controller Design and Experimental Studies 124 5.5 Conclusion 129 6 Dual-Stroke, Dual-Resolution Uniaxial Flexure Stage 131 6.1 Introduction 131 6.2 Conceptual Design 132 6.3 Mechanism Design 136 6.4 Performance Evaluation 140 6.5 Prototype Development and Experimental Studies 144 6.6 Conclusion 152 7 Multi-Stroke, Multi-Resolution XY Flexure Stage 155 7.1 Introduction 155 7.2 Conceptual Design 156 7.3 Flexure-Based Compliant Mechanism Design 160 7.4 Parametric Design 162 7.5 Stage Performance Assessment 167 7.6 Prototype Development and Experimental Studies 171 7.7 Conclusion 183 Part III Large-Range Rotational Micropositioning Systems 185 8 Rotational Stage with Linear Drive 187 8.1 Introduction 187 8.2 Design of MCRF 188 8.3 Design of a Rotary Stage with MCRF 194 8.4 Performance Evaluation with FEA Simulation 198 8.5 Prototype Development and Experimental Studies 203 8.6 Conclusion 210 9 Rotational Stage with Rotary Drive 213 9.1 Introduction 213 9.2 New Design of MCRF 214 9.3 Design of the Rotary Stage 221 9.4 Performance Evaluation with FEA Simulation 226 9.5 Prototype Fabrication and Experimental Testings 233 9.6 Conclusion 239 Part IV Applications to Compliant Gripper Design 241 10 Large-Range Rotary Gripper 243 10.1 Introduction 243 10.2 Mechanism Design and Analysis 245 10.3 Performance Evaluation with FEA Simulation 254 10.4 Prototype Development and Calibration 258 10.5 Performance Testing Results 266 10.6 Conclusion 276 11 MEMS Rotary Gripper 279 11.1 Introduction 279 11.2 MEMS Gripper Design 280 11.3 Performance Evaluation with FEA Simulation 287 11.4 Gripper Fabrication 290 11.5 Experimental Results and Discussion 294 11.6 Conclusion 303 Index 305