Scanning Electron Microscopy
Physics of Image Formation and Microanalysis
2nd Edition
Published on 11. November 2013
XIV, 529 pages
978-3-540-38967-5 (ISBN)
Description
Scanning Electron Microscopy
provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Reviews / Votes
"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."
T Mulvey, Measurement Science and Technology. 11, No12, December 2000
More details
Series
Edition
Second Edition 1998
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Illustrations
XIV, 529 p.
File size
59,86 MB
ISBN-13
978-3-540-38967-5 (9783540389675)
DOI
10.1007/978-3-540-38967-5
Schweitzer Classification
Other editions
Additional editions
Book
09/1998
2nd Edition
Springer
€374.49
Shipment within 10-15 days
Previous edition
E-Book
11/2013
1st Edition
Springer
€85.59
Available for download
Persons
Content
Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.
