Non-Crystalline Films for Device Structures
Academic Press
Published on 11. December 2001
265 pages
978-0-08-054295-9 (ISBN)
Description
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical and their technological aspects. Volume 29 consists of chapters pulled from Hari Singh Nalwa's forthcoming Handbook of Thin Film Materials (ISBN: 0-12-512908-4). The chapters were selected because they deal exclusively with amorphous film structures and because they have a common relevance to semiconductor, or electronic, devices and circuits. These are subjects not yet stressed in the Thin Films series.
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Maurice H. Francombe
Non-Crystalline Films for Device Structures: Volume 29
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12/2001
Academic Press
€155.01
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Content
- Cover
- Contents
- Contributors
- Preface
- Chapter 1. Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices
- 1.1. Introduction
- 1.2. Requirements of Ultrathin Gate Dielectric Films
- 1.3. Ultrathin Gate Dielectric Film Processing
- 1.4. Characterization of Ultrathin Gate Dielectric Films
- 1.5. Hydrogen and Ultrathin Gate Dielectric Films
- 1.6. Silicon Oxide Gate Dielectric Films
- 1.7. Silicon Oxynitride Gate Dielectric Films
- 1.8. Alternative (High-k) Gate Dielectric Films
- 1.9. Final Remarks
- Acknowledgments
- References
- Chapter 2. Electrochemical Passivation of Si and SiGe Surfaces
- 2.1. Introduction
- 2.2. In Situ Characterization of Surface Bond Configurations and Electronic Surface States
- 2.3. Electrochemically Hydrogenated Si Surfaces
- 2.4. Hydrogenated Porous Silicon
- 2.5. Thin Anodic Oxides on Si
- 2.6. Thick Anodic Oxides on Si
- 2.7. Enhanced Passivation of SiGe by Anodic Oxidation
- Acknowledgments
- References
- Index
- Recent Volumes In This Series
