
Particle Adhesion and Removal
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Kashmiri Lal Mittal was employed by the IBM Corporation from 1972 through 1993. Currently, he is teaching and consulting worldwide in the broad areas of adhesion as well as surface cleaning. He has received numerous awards and honors including the title of doctor honoris causa from Maria Curie-SkBodowska University, Lublin, Poland. He is the editor of more than 115 books dealing with adhesion measurement, adhesion of polymeric coatings, polymer surfaces, adhesive joints, adhesion promoters, thin films, polyimides, surface modification, surface cleaning, and surfactants. Dr. Mittal is also the Founding Editor of the journal Reviews of Adhesion and Adhesives.
Ravi Jaiswal is a chemical engineer and an active researcher in the field of surface and interfacial science. He has authored more than 10 original research publications in the field of particle adhesion and removal. He has delivered more than 10 technical talks in the national and international conferences covering topics relevant to particle adhesion. He is a regular reviewer of the research manuscripts published in the journal of IEEE Transactions on Semiconductor Manufacturing. He has been awarded 'Leighton H. Peebles Award' by The Adhesion Society in 2009 in the recognition to his outstanding graduate research contribution in the field of adhesion science and technology. Ravi completed his bachelor degree in chemical engineering from Indian Institute of Technology (IIT) Kanpur, India in 2004. He graduated with PhD in chemical engineering from Purdue University, W. Lafayette, IN, USA in 2008. He is currently employed at Sun Edison (formerly MEMC Electronic Materials), St. Peters, MO as a research scientist.
Content
Preface xv Part 1: Particle Adhesion: Fundamentals 1 1 Fundamental Forces in Particle Adhesion 3 Stephen Beaudoin, Priyanka Jaiswal, Aaron Harrison, Jennifer Laster, Kathryn Smith, Melissa Sweat, and Myles Thomas 1.1 Introduction 3 1.2 Various Forces in Particle Adhesion 4 1.3 Summary 69 References 70 2 Mechanics of Particle Adhesion and Removal 81 Goodarz Ahmadi 2.1 Introduction 81 2.2 Models 83 2.3 Simulations Results 96 2.4 Summary and Conclusions 99 Acknowledgements 100 References 100 3 Microscopic Particle Contact Adhesion Models and Macroscopic Behavior of Surface Modified Particles 105 Katja Mader-Arndt, Zinaida Kutelova, and Jürgen Tomas 3.1 Introduction 105 3.2 Constitutive Contact Models 107 3.3 Macroscopic Powder Behavior - Continuum Mechanics Approach 121 3.4 Surface Modification to Alter the Adhesion Properties 124 3.5 Experimental Measurements of the Adhesion Forces 130 3.6 Summary and Conclusions 146 Acknowledgements 147 List of Symbols 147 References 148 4 Characterization of Single Particle Adhesion: A Review of Recent Progress 157 Armin Saeedi Vahdat and Cetin Cetinkaya 4.1 Introduction 157 4.2 Background 159 4.3 Recent Developments 167 4.4 Conclusions and Remarks 193 Acknowledgments 194 List of Symbols 194 References 196 Part 2: Particle Removal Techniques 201 5 High Intensity Ultrasonic Cleaning for Particle Removal 203 Sami B. Awad and Nadia F. Awad 5.1 Introduction 204 5.2 Ultrasound and Ultrasonics 204 5.3 Cavitation Phenomenon 207 5.4 Generation of Ultrasound - Transducers 211 5.5 Ultrasonic Generators 217 5.6 Principles of Ultrasonic Cleaning for Particle Removal 219 5.7 Determination of Residual Particles on Surfaces 223 5.8 Ultrasonic Aqueous Cleaning Equipment and Process 225 5.9 Precision Cleaning 228 5.10 Contaminants 228 5.11 Ultrasonic Cavitation Forces and Surface Cleaning 230 5.12 Cleaning Chemistry 232 5.13 Mechanism of Cleaning 236 5.14 Cavitation Erosion 238 5.15 Summary 239 References 239 6 Megasonic Cleaning for Particle Removal 243 Manish Keswani, Rajesh Balachandran, and Pierre Deymier 6.1 Introduction 243 6.2 Principles of Megasonic Cleaning 247 6.3 Particle Removal Mechanisms During Megasonic Cleaning 259 6.4 Types of Megasonic Systems 262 6.5 Particle Removal and Feature Damage in Megasonic Cleaning 264 6.6 Summary 274 References 274 7 High Speed Air Jet Removal of Particles from Solid Surfaces 281 Kuniaki Gotoh 7.1 Introduction 281 7.2 Fundamental Characteristics of the Air Jet 282 7.3 Fundamentals of Air Jet Particle Removal 286 7.4 New Methods Using Air Jet 300 7.5 Summary and Prospect 307 List of Symbols 308 References 309 8 Droplet Spray Technique for Particle Removal 313 James T. Snow, Masanobu Sato, and Takayoshi Tanaka 8.1 Introduction 313 8.2 Droplet Impact Phenomena 314 8.3 Cleaning Process Window 318 8.4 Droplet Spray Technique for Semiconductor Wafer Cleaning 324 8.5 Summary 331 References 331 9. Laser-Induced High-Pressure Micro-Spray Process for Nanoscale Particle Removal 337 Daehwan Ahn, Changho Seo, and Dongsik Kim 9.1 Introduction 337 9.2 Concept of Droplet Opto-Hydrodynamic Cleaning (DOC) 340 9.3 Micro-Spray Generation by LIB 343 9.4 Mechanisms of Particle Removal by Laser-Induced Spray Jet 344 9.5 Generation of Micro-Spray Jet 345 9.6 Nanoscale Particle Removal 352 9.7 Summary 360 References 360 10 Wiper-Based Cleaning of Particles from Surfaces 365 Brad Lyon and Jay Postlewaite 10.1 Introduction 366 10.2 Basic Mechanism of Wiping for Cleaning of Particles and Other Contaminants 371 10.3 Various Types of Wipers 379 10.4 Proper Ways to Carry Out Wiping or How to Use Wipers Properly 390 10.5 Characterization of Wipers 396 10.6 Results Obtained Using Wiping 398 10.7 Future Directions 405 10.8 Summary 406 References 408 11 Application of Strippable Coatings for Removal of Particulate Contaminants 411 Rajiv Kohli 11.1 Introduction 411 11.2 Coating Description 412 11.3 Types of Strippable Coatings 413 11.4 Issues with Strippable Coatings 426 11.5 Precision Cleaning Applications 427 11.6 Summary 443 Disclaimer 443 References 443 12 Cryoaerosol Cleaning of Particles from Surfaces 453 Souvik Banerjee 12.1 Introduction 453 12.2 History of Cryoaerosol Cleaning 455 12.3 Thermodynamics of Cryoaerosol Processes 456 12.4 Cleaning Mechanism 461 12.5 Factors Affecting Cleaning Performance 462 12.6 Results Obtained by Cryoaerosol Cleaning 469 12.7 Summary and Prospects 473 References 474 13 Supercritical Carbon Dioxide Cleaning: Relevance to Particle Removal 477 Rajiv Kohli 13.1 Introduction 477 13.2 Surface Cleanliness Levels 478 13.3 Dense Phase Fluids 479 13.4 Principles of Supercritical CO2 Cleaning 489 13.5 Advantages and Disadvantages of Supercritical CO2 Cleaning 493 13.6 Applications 496 13.7 Summary and Conclusions 502 Acknowledgement 503 Disclaimer 503 References 503 14 The Use of Surfactants to Enhance Particle Removal from Surfaces 519 Brian Grady 14.1 Introduction 519 14.2 Solid-Solid Interactions 520 14.3 Introduction to Surfactants 524 14.4 Surfactant Adsorption at Solid Surfaces 529 14.5 Surfactants and Particulate Removal 535 14.6 Prospects 539 14.7 Summary 540 Acknowledgements 540 References 540 Index 543
Chapter 1
Fundamental Forces in Particle Adhesion
Stephen Beaudoin1, Priyanka Jaiswal2, Aaron Harrison1, Jennifer Laster1, Kathryn Smith1, Melissa Sweat1, and Myles Thomas1
1School of Chemical Engineering, Purdue University, W. Lafayette, IN, USA,
2Department of Applied Chemistry & Polymer Technology, Delhi Technological University (formerly Delhi College of Engineering), New Delhi, India
*Corresponding author: sbeaudoi@purdue.edu
Abstract
van der Waals, capillary, and electrostatic forces acting at the interface between a particle and a surface drive the adhesion behavior of the particles. If one can describe the nature and the strength of these forces as a function of the properties of the two interacting solids and the intervening medium, it is possible to predict and, in many cases, to control particle adhesion. This chapter focuses on the factors that influence the nature and strength of the forces, the fundamental theories that describe them, and the relevant mathematical expressions required to quantify them, with a caveat that the analysis presented is limited to systems with ideal geometry. Specifically, more advanced analysis, which may account for aspects such as roughness, non-uniform shape, deformation, and other complicating aspects, is not treated.
Keywords: Particle adhesion, van der Waals force, Hamaker constant, electrostatic force, double layer, capillary force, surface tension, surface energy.
1.1 Introduction
Particle adhesion influences many areas of science and engineering, including semiconductor fabrication, pharmaceuticals, cosmetics, mining, separations, petroleum production, surface coating, and food processing, to name a few. In the context of this chapter, adhesion is an interfacial phenomenon which appears when two solid bodies, one of which is of colloidal dimensions, approach each other closely. As the two surfaces approach, a complex interplay of van der Waals, electrostatic, and capillary forces drives the resulting behavior. Thorough knowledge of these surface forces is essential to understanding particle adhesion.
1.2 Various Forces in Particle Adhesion
In most applications of practical interest, the forces that control the adhesion between solid particles and solid surfaces are van der Waals (dipole) forces, electrostatic forces, and forces resulting from any liquid bridges due to capillaries or adsorbed molecular water between the two solids. Depending on the composition of the particle, the solid, and the ambient medium (air of varying relative humidity or aqueous solution are of interest here), the relative importance of these may change. This chapter provides an overview of these varying forces.
1.2.1 Capillary Forces
When a solid particle of characteristic dimension on the order of 100 micrometers or smaller is in contact with a solid surface in a gaseous medium (air), the relative humidity (RH) of the air is a critical factor in the relative importance of the forces that will influence the adhesion between the particle and surface [1,2]. Specifically, water molecules in humid air will minimize their free energy by adsorbing on surfaces at low humidity and by condensing onto surfaces at higher humidity, if the surfaces of interest are sufficiently hydrophilic [3-8]. If condensed moisture forms liquid bridges between a particle and a surface, the capillary forces resulting from these liquid bridges will generally be the controlling forces in the particle adhesion [9]. The behavior of adsorbed water molecules has been studied using gravimetric methods, ellipsometry, nuclear magnetic resonance (NMR), atomic force microscopy (AFM) and the surface force apparatus (SFA), among others [3-8, 10-19].
1.2.1.1 Forces Across a Curved Liquid Interface
When a solid surface comes in contact with a liquid medium, the difference in the magnitude of the net cohesive forces between the liquid molecules (i.e., Fl-l), and the net adhesion force between the liquid and the solid molecules (i.e., Fs-l) initiates the formation of a liquid meniscus at the solid/liquid interface. The nature of the curvature of the liquid meniscus (concave or convex) depends on which force, Fs-l (concave) or Fl-l (convex) is dominant. This leads to the phenomenon of wetting or de-wetting of the surface. Figure 1.1 shows an example of a liquid climbing on a solid plate. In this case, Fs-l > Fl-l. Solid surfaces which have Fs-l > Fl-l are known as high energy surfaces. If the liquid is an aqueous solution, these are known as hydrophilic surfaces. If the liquid is non-aqueous, they are known as lyophilic surfaces. Such surfaces facilitate wetting. Mica, silicon dioxide, metals, and oxidized surfaces in general are typically hydrophilic. Solid surfaces in which Fs-l < Fl-l are known as low energy surfaces. If the liquid is an aqueous solution, these are the hydrophobic surfaces. If the liquid is non-aqueous, they are the lyophobic surfaces. They facilitate de-wetting. Most organic surfaces, including most polymers, are hydrophobic. The surface energy of such materials can be increased by surface modifications (e.g., surface oxidation achieved via ultraviolet radiation, plasma discharge, laser irradiation, etc.) to enhance their hydrophilicity [20].
Figure 1.1 Meniscus formation on a solid plate partially immersed in a wetting liquid.
1.2.1.1.1 Surface Tension Force Acting at a Solid/Liquid Interface
The origin of surface tension is the unbalanced intermolecular force acting on the liquid molecules at the surface. The molecules present in the bulk of the liquid experience no net intermolecular force as they are surrounded by molecules of similar properties and hence are in a low energy state. However, the liquid molecules present at a liquid/solid or liquid/air interface are in an unbalanced or high energy state as they experience a net intermolecular force resulting from the difference in properties of the molecules in the different media. This leads to the development of the surface tension force. The surface tension (?) is quantified as the net surface tension force acting on a unit length of the liquid/solid or liquid/air interface. Figure 1.2 is a schematic of a spherical particle in contact with a solid surface through a liquid medium. The surface tension force, Fst, acting on the solid/liquid boundary (the dotted line) can be obtained as
where a is the angle of inclination of the liquid meniscus from the vertical, and lwetted is the perimeter of the meniscus boundary on the solid surface.
Figure 1.2 Schematic showing surface tension force acting at the solid/liquid interface.
1.2.1.1.2 Capillary Pressure Force Acting Across a Curved Liquid Interface
The micro-/nano-contacts between two solid surfaces act as active sites for condensation in a humid environment if the RH is above a critical value. When condensed moisture comes in contact with the solid surfaces, a liquid meniscus is formed in the contact region bridging the two solid surfaces, as shown in Figure 1.3.
Figure 1.3 A liquid bridge surrounding a solid particle in contact with a flat substrate.
Menisci form through two methods on solid surfaces: the spontaneous condensation of a vapor in a confined space (otherwise known as capillary condensation) and, for non-volatile liquids, the combination of adsorbed layers (on the two adhering surfaces) merged into a meniscus. A meniscus induces a pressure difference across the liquid-vapor interface, as shown in Figure 1.4, where the pressure on the liquid side of the meniscus is lower than that in the surrounding vapor. This pressure difference is described by the Young-Laplace equation
(1.2)
where ?P is the pressure difference across the meniscus (the Laplace pressure), ?l is the surface tension of the liquid condensate, and rn and rp are the two principal radii of curvature (ROC) of the liquid bridge between the surfaces [21]. The Laplace pressure acts over an area, A, and induces a force that pulls the two surfaces together increasing the total adhesion force [9]. The normal surface tension force around the circumference of the meniscus (Equation 1.1) also contributes to the force, but it is usually small compared to the pressure-induced force and is often not considered for micro-scale particles [9].
Figure 1.4 A spherical particle adhering onto a flat substrate with a liquid bridge formed at the solid-solid interface. The meniscus geometry is shown on the right.
The following relations can be obtained for the geometry shown:
(1.3)
where d is the height of the particle inside the liquid bridge, and D is the separation distance, as shown in Figure 1.4, ?1 and ?2 are the contact angles of the liquid with the sphere (1) and the flat substrate (2), and f is the half angle subtended at the center of the sphere by the wetted area of the sphere (this is also known as the embracing' or 'filling' angle).
The ROC, rn, can also be obtained from the geometry shown in Figure 1.4:
where R is the particle radius. The equilibrium capillary pressure force,...
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