Handbook of Vacuum Science and Technology
Published on 29. October 1997
835 pages
978-0-08-053375-9 (ISBN)
Description
The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner.
- User oriented with many useful tables, charts, and figures of use to the practitioner
- Reviews new vacuum materials and equipment
- Illustrates the design and maintenance of modern vacuum systems
- Includes well referenced chapters
More details
Other editions
Additional editions
Dorothy M. Hoffman | Bawa Singh | John H. Thomas
Handbook of Vacuum Science and Technology
Book
10/1997
Academic Press
€179.51
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Content
Fundamentals of Vacuum Technology and Surface PhysicsB. Singh and J.H. Thomas, IIIVacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum ScienceCreation of VacuumM. HablanianThe Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV PumpsVacuum MeasurementsH.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr.,Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow MeasurementsSystems Design and ComponentsComponents for Vacuum Equipment and Systems: N.T. PeacockValves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum SurfacesVacuum ApplicationsHigh Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based ProcessesLarge-Scale Vacuum Based ProcessesW. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.
