Handbook of Mems for Wireless and Mobile Applications

Contributor contact details Woodhead Publishing Series in Electronic and Optical Materials Dedication Preface Part I: RF MEMS as an enabling technology for wireless applications Chapter 1: Overview of RF MEMS technology and applications Abstract: 1.1 Introduction 1.2 Radio frequency microelectromechanical systems (RF MEMS) operation principle and common realizations 1.3 RF MEMS design challenges 1.4 RF MEMS applications 1.5 Conclusion 1.6 Sources of further information and advice 1.7 Acknowledgements Chapter 2: Overview of wireless techniques for use with MEMS Abstract: 2.1 Introduction 2.2 Transport layer issues 2.3 Network layer mobility issues 2.4 Data-link layer 2.5 Physical layer 2.6 The wireless link budget 2.7 Physical layer system design 2.8 Conclusion Chapter 3: RF MEMS fabrication technologies Abstract: 3.1 Introduction 3.2 MEMS-based technologies for RF circuits with enhanced quality factor and minimized losses 3.3 Technologies for smart RF MEMS 3.4 Highlights on specific key steps in RF MEMS fabrication 3.5 Towards integrated technology for microsystem implementation 3.6 Emerging technologies in wireless applications 3.7 Conclusion 3.8 Acknowledgements Chapter 4: RF MEMS passive components for wireless applications Abstract: 4.1 Introduction 4.2 RF MEMS passive components and their applications 4.3 High-performance passive components enabled by RF MEMS technology 4.4 Complex networks based on RF MEMS passive components 4.5 Conclusion Chapter 5: RF MEMS phase shifters for wireless applications Abstract: 5.1 Introduction 5.2 Switched-line phase shifter 5.3 Loaded-line phase shifter 5.4 Reflection-type phase shifter 5.5 Distributed-line phase shifter 5.6 Mixed-architectures and exotic phase shifters 5.7 Towards global manufacturing 5.8 Applications 5.9 Conclusion Chapter 6: RF MEMS antennas for wireless applications Abstract: 6.1 Introduction 6.2 RF MEMS antennas 6.3 Reconfigurable feeding networks 6.4 Reconfigurable antennas 6.5 Design considerations 6.6 Conclusion and future trends 6.7 Sources of further information and advice Chapter 7: RF MEMS-based wireless architectures and front-ends Abstract: 7.1 Introduction 7.2 Communication standards 7.3 Receivers, transmitters and transceivers: basic architectures 7.4 Conventional component technology 7.5 MEMS-based technology: filters, duplexers, switches, tunable devices and architecture 7.6 Diversity in receivers and transmitters 7.7 Multi-input multi-output (MIMO) systems 7.8 Systems-on-a-chip 7.9 Conclusion Chapter 8: RF MEMS technology for next-generation wireless communications Abstract: 8.1 Introduction 8.2 RF MEMS technology 8.3 RF MEMS technology for high-performance passive components 8.4 Technology platform for the fabrication of RF MEMS complex circuits 8.5 Some examples of high-performance devices enabled by the RF MEMS technology 8.6 Conclusion Chapter 9: Wafer-level packaging technology for RF MEMS Abstract: 9.1 Introduction 9.2 Wafer -level zero-level packaging for RF MEMSSS 9.3 Electrical effects of the packaging material on the packaged devices 9.4 Packaging with hard cap materials 9.5 Packaging with a polymer cap 9.6 Conclusion Chapter 10: Reliability of RF MEMS Abstract: 10.1 Introduction 10.2 Overview of failure mechanisms in RF MEMS 10.3 Charging in RF MEMS 10.4 Analytical modelling 10.5 Electrostatic discharge 10.6 Reliability issues of MEMS packages 10.7 Conclusion Part II: Wireless techniques and applications of wireless MEMS Chapter 11: Energy harvesters for powering wireless systems Abstract: 11.1 Introduction 11.2 Kinetic energy harvesters 11.3 Design of kinetic energy harvesters 11.4 Other typologies of energy harvesters 11.5 Conclusion 11.6 References 11.7 Appendix: list of symbols Chapter 12: MEMS wireless implantable systems: historical review and perspectives Abstract: 12.1 Introduction 12.2 Basic considerations and characteristics of wireless MEMS implantable systems 12.