
Optical Metrology for Precision Engineering
Description
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This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields.
Introduces fundamental theories and techniques
Combines theories with practical applications
Presents technologies in an easy-to-understand way
More details
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Additional editions


Persons
Wei Gao and Yuki Shimizu, Tohoku University, Japan.
Content
Chapter 1 Fundamentals of Precision Metrology
Chapter 2 Measurement of Length
Chapter 3 Measurement of Angle
Chapter 4 Measurement of Time
Chapter 5 Measurement of dimensions
Chapter 5 Measurement of Straightness and Flatness
Chapter 6 Measurement of roundness and cylindricity
Chapter 7 Measurement squareness
Chapter 8 Measurement of surface roughness
Chapter 9 Measurement of microstructures
Chapter 10 Measurement of internal structures
Chapter 11 Measurement of displacement
Chapter 12 Measurement of velocity
Chapter 13 Measurement of acceleration
Chapter 14 Measurement uncertainty
References
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